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Title: A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy

Abstract

Limited Z-axis bandwidth of piezotube scanners used in conventional Scanning Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan speeds in STM applications. Slow Z-axis dynamics of typical piezotube scanners combined with the weight of the STM tip/tip holder assembly, that the scanner has to carry, substantially limit the achievable Z-axis bandwidth in both imaging and lithography modes. To tackle this issue, we introduce a high bandwidth microelectromechanical-system-based nanopositioner to be integrated into an existing STM scanner. The device is designed to replace the STM tip and fine Z-positioning mechanisms in the conventional STM setup, while providing an order of magnitude higher bandwidth in Z axis. The device is microfabricated using double silicon-on-isolator technology, and standard cleanroom processes. Experiments show that tunneling current between the device tip and a highly ordered pyrolytic graphite sample can be successfully established and maintained in air using the proposed device in a feedback loop. Results suggest that the proposed device uniquely combines a very high resolution and a large stroke with a substantially larger Z-axis bandwidth compared to that of conventional STM piezotube scanners, enabling higher scanning speeds in STM operations.

Authors:
ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]
  1. Univ. of Texas-Dallas, Richardson, TX (United States)
Publication Date:
Research Org.:
Univ. of Texas at Dallas, Richardson, TX (United States)
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Manufacturing Office
OSTI Identifier:
1548310
Alternate Identifier(s):
OSTI ID: 1545907
Grant/Contract Number:  
EE0008322
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 90; Journal Issue: 7; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; Scanning Tunneling Microscopy; MEMS; Nanopositioner; In-plane tip

Citation Formats

Alipour, Afshin, Coskun, M. Bulut, and Moheimani, S. O. Reza. A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy. United States: N. p., 2019. Web. doi:10.1063/1.5109900.
Alipour, Afshin, Coskun, M. Bulut, & Moheimani, S. O. Reza. A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy. United States. https://doi.org/10.1063/1.5109900
Alipour, Afshin, Coskun, M. Bulut, and Moheimani, S. O. Reza. 2019. "A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy". United States. https://doi.org/10.1063/1.5109900. https://www.osti.gov/servlets/purl/1548310.
@article{osti_1548310,
title = {A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy},
author = {Alipour, Afshin and Coskun, M. Bulut and Moheimani, S. O. Reza},
abstractNote = {Limited Z-axis bandwidth of piezotube scanners used in conventional Scanning Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan speeds in STM applications. Slow Z-axis dynamics of typical piezotube scanners combined with the weight of the STM tip/tip holder assembly, that the scanner has to carry, substantially limit the achievable Z-axis bandwidth in both imaging and lithography modes. To tackle this issue, we introduce a high bandwidth microelectromechanical-system-based nanopositioner to be integrated into an existing STM scanner. The device is designed to replace the STM tip and fine Z-positioning mechanisms in the conventional STM setup, while providing an order of magnitude higher bandwidth in Z axis. The device is microfabricated using double silicon-on-isolator technology, and standard cleanroom processes. Experiments show that tunneling current between the device tip and a highly ordered pyrolytic graphite sample can be successfully established and maintained in air using the proposed device in a feedback loop. Results suggest that the proposed device uniquely combines a very high resolution and a large stroke with a substantially larger Z-axis bandwidth compared to that of conventional STM piezotube scanners, enabling higher scanning speeds in STM operations.},
doi = {10.1063/1.5109900},
url = {https://www.osti.gov/biblio/1548310}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 7,
volume = 90,
place = {United States},
year = {2019},
month = {7}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Figures / Tables:

FIG. 1 FIG. 1: An STM image of a hydrogen passivated silicon surface obtained by the FIB tip during pilot experiments.

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Works referenced in this record:

Scanning tunneling microscopy
journal, March 1983


Atomic precision lithography on Si
journal, January 2009

  • Randall, J. N.; Lyding, J. W.; Schmucker, S.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6
  • https://doi.org/10.1116/1.3237096

Apparent barrier height in scanning tunneling microscopy
journal, June 1988


Tip-Sample Interactions in the Scanning Tunneling Microscope for Atomic-Scale Structure Fabrication
journal, March 1993


A self-tuning controller for high-performance scanning tunneling microscopy
conference, August 2017


Rigid design of fast scanning probe microscopes using finite element analysis
journal, August 2004


A high-speed atomic force microscope for studying biological macromolecules
journal, October 2001


High-speed Atomic Force Microscopy for Capturing Dynamic Behavior of Protein Molecules at Work
journal, January 2005


A serial-kinematic nanopositioner for high-speed atomic force microscopy
journal, October 2014


Design and Modeling of a High-Speed AFM-Scanner
journal, September 2007


Design of an Inertially Counterbalanced $Z$ -Nanopositioner for High-Speed Atomic Force Microscopy
journal, March 2013


High-speed AFM and nano-visualization of biomolecular processes
journal, December 2007


Scanning probe microscopes go video rate and beyond
journal, May 2005


A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control
journal, March 2015


High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy
journal, February 2015


A 2DOF SOI-MEMS Nanopositioner With Tilted Flexure Bulk Piezoresistive Displacement Sensors
journal, April 2016


Zero displacement microelectromechanical force sensor using feedback control
journal, April 2014


Integrated micro‐scanning tunneling microscope
journal, October 1995


Microfabricated scanning tunneling microscope
journal, November 1989


Bulk micromachined tunneling tips integrated with positioning actuators
journal, February 2005


MEMS-based high speed scanning probe microscopy
journal, April 2010


Active CMOS-MEMS conductive probes and arrays for tunneling-based atomic-level surface imaging
conference, June 2011


Scanning probe microscopy at video-rate
journal, January 2008


Variable‐temperature scanning tunneling microscope
journal, September 1988


Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds
journal, September 2014


Nanotubes as nanoprobes in scanning probe microscopy
journal, November 1996


Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing
journal, January 2019


On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach
journal, February 2017


On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers With Integrated Piezoelectric Transducers
journal, December 2017


$Q$ Control of an Active AFM Cantilever With Differential Sensing Configuration
journal, September 2019


Feedback-Controlled MEMS Force Sensor for Characterization of Microcantilevers
journal, August 2015


Integrated tunneling sensor for nanoelectromechanical systems
journal, October 2006


A method for in situ characterization of tip shape in ac-mode atomic force microscopy using electrostatic interaction
journal, October 1998


Observation of Liquid Neck Formation with Scanning Force Microscopy Techniques
journal, April 1998


Capillary forces in tapping mode atomic force microscopy
journal, October 2002