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Title: Enhancement of Optical Emission and Ion Currents in a Laser Produced Silicon Plasma by Femtosecond Laser-Induced Periodic Surface Structuring

Abstract

Laser-induced periodic surface structuring is a powerful technique for modifying the surface properties of solids. Using ultrashort pulses from a Ti:Sapphire laser (800 nm, 100 fs) we have fabricated nanoscale order laser-induced periodic surface structures (LIPSS) on a silicon (100) surface. The LIPSS patterns are found to be strongly dependent on the laser pulse energy, state of polarization, number of shots delivered on the target, and the ambient pressure. The role of laser wavelength is studied by using the second harmonic output (400 nm) also for fabrication. Large area (5x4 mm2) surface structuring has been carried out at atmospheric pressure after optimizing the laser parameters at 800 nm. The patterned silicon surface shows a substantial reduction in the reflection of incident light over a wide range of wavelengths, in comparison to plain silicon. Moreover, when used for laser induced breakdown spectroscopy (LIBS) experiments, enhanced optical emission and ion current have been observed from the patterned surface. This indicates that coupling of laser energy to the surface is enhanced in the case of patterned silicon. While spectral lines emitted by doubly ionized silicon have been observed from the patterned surface, the plain surface gives lines from singly ionized silicon only. Amore » discernible enhancement has been measured in both optical (50-90%) and electrical (34%) signals from the plasma generated on the patterned surface. These results confirm that LIPSS is a versatile method for enhancing the coupling of laser energy on to irradiated solid surfaces.« less

Authors:
 [1];  [2];  [2]; ORCiD logo [3];  [2]
  1. Universita degli Studi di Napoli Frederico II
  2. Raman Research Institute
  3. BATTELLE (PACIFIC NW LAB)
Publication Date:
Research Org.:
Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1545073
Report Number(s):
PNNL-SA-135428
DOE Contract Number:  
AC05-76RL01830
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 25; Journal Issue: 6
Country of Publication:
United States
Language:
English
Subject:
ion currents, optical emission, laser produced silicon plasma, femtosecond laser, femtosecond laser-induced periodic surface structuring

Citation Formats

Anoop, K K., Verma, Nancy, Joy, Nithin, Harilal, Sivanandan S., and Philip, Reji. Enhancement of Optical Emission and Ion Currents in a Laser Produced Silicon Plasma by Femtosecond Laser-Induced Periodic Surface Structuring. United States: N. p., 2018. Web. doi:10.1063/1.5038913.
Anoop, K K., Verma, Nancy, Joy, Nithin, Harilal, Sivanandan S., & Philip, Reji. Enhancement of Optical Emission and Ion Currents in a Laser Produced Silicon Plasma by Femtosecond Laser-Induced Periodic Surface Structuring. United States. doi:10.1063/1.5038913.
Anoop, K K., Verma, Nancy, Joy, Nithin, Harilal, Sivanandan S., and Philip, Reji. Fri . "Enhancement of Optical Emission and Ion Currents in a Laser Produced Silicon Plasma by Femtosecond Laser-Induced Periodic Surface Structuring". United States. doi:10.1063/1.5038913.
@article{osti_1545073,
title = {Enhancement of Optical Emission and Ion Currents in a Laser Produced Silicon Plasma by Femtosecond Laser-Induced Periodic Surface Structuring},
author = {Anoop, K K. and Verma, Nancy and Joy, Nithin and Harilal, Sivanandan S. and Philip, Reji},
abstractNote = {Laser-induced periodic surface structuring is a powerful technique for modifying the surface properties of solids. Using ultrashort pulses from a Ti:Sapphire laser (800 nm, 100 fs) we have fabricated nanoscale order laser-induced periodic surface structures (LIPSS) on a silicon (100) surface. The LIPSS patterns are found to be strongly dependent on the laser pulse energy, state of polarization, number of shots delivered on the target, and the ambient pressure. The role of laser wavelength is studied by using the second harmonic output (400 nm) also for fabrication. Large area (5x4 mm2) surface structuring has been carried out at atmospheric pressure after optimizing the laser parameters at 800 nm. The patterned silicon surface shows a substantial reduction in the reflection of incident light over a wide range of wavelengths, in comparison to plain silicon. Moreover, when used for laser induced breakdown spectroscopy (LIBS) experiments, enhanced optical emission and ion current have been observed from the patterned surface. This indicates that coupling of laser energy to the surface is enhanced in the case of patterned silicon. While spectral lines emitted by doubly ionized silicon have been observed from the patterned surface, the plain surface gives lines from singly ionized silicon only. A discernible enhancement has been measured in both optical (50-90%) and electrical (34%) signals from the plasma generated on the patterned surface. These results confirm that LIPSS is a versatile method for enhancing the coupling of laser energy on to irradiated solid surfaces.},
doi = {10.1063/1.5038913},
journal = {Physics of Plasmas},
number = 6,
volume = 25,
place = {United States},
year = {2018},
month = {6}
}

Works referenced in this record:

Laser-Induced Periodic Surface Structure on Solids: A Universal Phenomenon
journal, December 1982


Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass
journal, January 1983


Laser-induced periodic surface structure. III. Fluence regimes, the role of feedback, and details of the induced topography in germanium
journal, August 1984


Femtosecond laser-induced periodic surface structures
journal, September 2012

  • Bonse, J.; Krüger, J.; Höhm, S.
  • Journal of Laser Applications, Vol. 24, Issue 4
  • DOI: 10.2351/1.4712658

Laser-Induced Periodic Surface Structures— A Scientific Evergreen
journal, May 2017

  • Bonse, Jorn; Hohm, Sandra; Kirner, Sabrina V.
  • IEEE Journal of Selected Topics in Quantum Electronics, Vol. 23, Issue 3
  • DOI: 10.1109/JSTQE.2016.2614183

Growth of spontaneous periodic surface structures on solids during laser illumination
journal, November 1982


Laser-induced periodic surface structure. I. Theory
journal, January 1983


Periodic surface structures frozen into CO2 laser-melted quartz
journal, September 1982

  • Keilmann, F.; Bai, Y. H.
  • Applied Physics A Solids and Surfaces, Vol. 29, Issue 1
  • DOI: 10.1007/BF00618110

On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses
journal, November 2009

  • Bonse, Jörn; Rosenfeld, Arkadi; Krüger, Jörg
  • Journal of Applied Physics, Vol. 106, Issue 10
  • DOI: 10.1063/1.3261734

Femtosecond laser induced nanostructure formation: self-organization control parameters
journal, June 2008


Polarized spectral emittance from periodic micromachined surfaces. I. Doped silicon: The normal direction
journal, June 1988


One-dimensional antireflection gratings in (100) silicon: a numerical study
journal, January 1998

  • Auslender, Mark; Levy, David; Hava, Shlomo
  • Applied Optics, Vol. 37, Issue 2
  • DOI: 10.1364/AO.37.000369

Polarization-sensitive subwavelength antireflection surfaces on a semiconductor for 975 nm
journal, January 1996

  • Smith, R. E.; Warren, M. E.; Wendt, J. R.
  • Optics Letters, Vol. 21, Issue 15
  • DOI: 10.1364/OL.21.001201

Antireflection effect of femtosecond laser-induced periodic surface structures on silicon
journal, January 2011


Low-reflectance laser-induced surface nanostructures created with a picosecond laser
journal, March 2016


Metal Nanoplasmas as Bright Sources of Hard X-Ray Pulses
journal, March 2003


Laser induced surface structuring of Cu for enhancement of field emission properties
journal, February 2018

  • Akram, Mahreen; Bashir, Shazia; Jalil, Sohail Abdul
  • Materials Research Express, Vol. 5, Issue 2
  • DOI: 10.1088/2053-1591/aaa8ac

Emission dynamics of an expanding ultrafast-laser produced Zn plasma under different ambient pressures
journal, September 2013

  • Smijesh, N.; Philip, Reji
  • Journal of Applied Physics, Vol. 114, Issue 9
  • DOI: 10.1063/1.4820575

Multidiagnostic analysis of ion dynamics in ultrafast laser ablation of metals over a large fluence range
journal, February 2015

  • Anoop, K. K.; Polek, M. P.; Bruzzese, R.
  • Journal of Applied Physics, Vol. 117, Issue 8
  • DOI: 10.1063/1.4913505

Simple technique for measurements of pulsed Gaussian-beam spot sizes
journal, January 1982


Plasma temperature clamping in filamentation laser induced breakdown spectroscopy
journal, January 2015

  • Harilal, S. S.; Yeak, J.; Phillips, M. C.
  • Optics Express, Vol. 23, Issue 21
  • DOI: 10.1364/OE.23.027113

Femtosecond laser ablation of silicon–modification thresholds and morphology
journal, January 2002


Ultrashort laser pulse ablation of copper, silicon and gelatin: effect of the pulse duration on the ablation thresholds and the incubation coefficients
journal, February 2016


Temperature dependent ablation threshold in silicon using ultrashort laser pulses
journal, November 2012

  • Thorstensen, Jostein; Erik Foss, Sean
  • Journal of Applied Physics, Vol. 112, Issue 10
  • DOI: 10.1063/1.4766380

Self-consistent optical parameters of intrinsic silicon at 300K including temperature coefficients
journal, November 2008


Two-photon absorption and Kerr coefficients of silicon for 850–2200nm
journal, May 2007

  • Bristow, Alan D.; Rotenberg, Nir; van Driel, Henry M.
  • Applied Physics Letters, Vol. 90, Issue 19
  • DOI: 10.1063/1.2737359

Dielectric functions and optical parameters of Si, Ge, GaP, GaAs, GaSb, InP, InAs, and InSb from 1.5 to 6.0 eV
journal, January 1983


Two-photon spectroscopy of silicon using femtosecond pulses at above-gap frequencies
journal, January 1990

  • Reitze, D. H.; Zhang, T. R.; Wood, Wm. M.
  • Journal of the Optical Society of America B, Vol. 7, Issue 1
  • DOI: 10.1364/JOSAB.7.000084

Scaling rules for multiphoton interband absorption in semiconductors
journal, January 1984


Surface electromagnetic waves in optics
journal, January 1992

  • Bonch-Bruevich, Alexey M.
  • Optical Engineering, Vol. 31, Issue 4
  • DOI: 10.1117/12.56133

From ripples to spikes: A hydrodynamical mechanism to interpret femtosecond laser-induced self-assembled structures
journal, July 2015


Surface structures induced by ultrashort laser pulses: Formation mechanisms of ripples and grooves
journal, October 2015


Femtosecond laser irradiation-induced infrared absorption on silicon surfaces
journal, April 2015


Engineering infrared emission properties of silicon in the near field and the far field
journal, July 2004


Zero infrared reflectance anomaly in doped silicon lamellar gratings. I. From antireflection to total absorption
journal, December 1995


Analysis of antireflection-structured surfaces with continuous one-dimensional surface profiles
journal, January 1993


Antireflection structured surfaces for the infrared spectral region
journal, January 1993


Influence of microroughness on emissivity
journal, September 2004

  • Ghmari, Faouzi; Ghbara, Taoufik; Laroche, Marine
  • Journal of Applied Physics, Vol. 96, Issue 5
  • DOI: 10.1063/1.1776634

Langmuir probe characterization of laser ablation plasmas
journal, February 2009

  • Doggett, Brendan; Lunney, James G.
  • Journal of Applied Physics, Vol. 105, Issue 3
  • DOI: 10.1063/1.3056131

Dynamics of the plumes produced by ultrafast laser ablation of metals
journal, August 2010

  • Donnelly, T.; Lunney, J. G.; Amoruso, S.
  • Journal of Applied Physics, Vol. 108, Issue 4
  • DOI: 10.1063/1.3475149