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Title: Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor

Abstract

Not provided.

Authors:
 [1];  [1];  [1];  [2]
  1. Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309
  2. Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309 and Department of Mechanical Engineering, University of Colorado, Boulder, Colorado 80309
Publication Date:
Research Org.:
General Electric Company, Boston, MA (United States)
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
OSTI Identifier:
1541661
DOE Contract Number:  
EE0005771
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 36; Journal Issue: 1; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English
Subject:
Materials Science; Physics

Citation Formats

Higgs, Daniel J., DuMont, Jaime W., Sharma, Kashish, and George, Steven M. Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor. United States: N. p., 2018. Web. doi:10.1116/1.5004041.
Higgs, Daniel J., DuMont, Jaime W., Sharma, Kashish, & George, Steven M. Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor. United States. doi:10.1116/1.5004041.
Higgs, Daniel J., DuMont, Jaime W., Sharma, Kashish, and George, Steven M. Mon . "Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor". United States. doi:10.1116/1.5004041.
@article{osti_1541661,
title = {Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor},
author = {Higgs, Daniel J. and DuMont, Jaime W. and Sharma, Kashish and George, Steven M.},
abstractNote = {Not provided.},
doi = {10.1116/1.5004041},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
issn = {0734-2101},
number = 1,
volume = 36,
place = {United States},
year = {2018},
month = {1}
}