Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source
Journal Article
·
· Plasma Sources Science and Technology
Not provided.
- Research Organization:
- Univ. of Michigan, Ann Arbor, MI (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- SC0001939
- OSTI ID:
- 1540462
- Journal Information:
- Plasma Sources Science and Technology, Vol. 27, Issue 5; ISSN 1361-6595
- Publisher:
- IOP Publishing
- Country of Publication:
- United States
- Language:
- English
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