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Title: Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source

Abstract

Not provided.

Authors:
ORCiD logo; ; ; ; ; ORCiD logo
Publication Date:
Research Org.:
Univ. of Michigan, Ann Arbor, MI (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1540462
DOE Contract Number:  
SC0001939
Resource Type:
Journal Article
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 27; Journal Issue: 5; Journal ID: ISSN 1361-6595
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English
Subject:
Physics

Citation Formats

Zhao, Kai, Liu, Yong-Xin, Kawamura, E., Wen, De-Qi, Lieberman, M. A., and Wang, You-Nian. Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source. United States: N. p., 2018. Web. doi:10.1088/1361-6595/aac242.
Zhao, Kai, Liu, Yong-Xin, Kawamura, E., Wen, De-Qi, Lieberman, M. A., & Wang, You-Nian. Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source. United States. doi:10.1088/1361-6595/aac242.
Zhao, Kai, Liu, Yong-Xin, Kawamura, E., Wen, De-Qi, Lieberman, M. A., and Wang, You-Nian. Tue . "Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source". United States. doi:10.1088/1361-6595/aac242.
@article{osti_1540462,
title = {Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source},
author = {Zhao, Kai and Liu, Yong-Xin and Kawamura, E. and Wen, De-Qi and Lieberman, M. A. and Wang, You-Nian},
abstractNote = {Not provided.},
doi = {10.1088/1361-6595/aac242},
journal = {Plasma Sources Science and Technology},
issn = {1361-6595},
number = 5,
volume = 27,
place = {United States},
year = {2018},
month = {5}
}