Atomic Layer Deposition: An Overview
journal
January 2010
Mechanisms of surface reactions in thin solid film chemical deposition processes
journal
December 2013
Atomic Layer Deposition of Noble Metals and Their Oxides
journal
September 2013
Atomic layer deposition—Sequential self-limiting surface reactions for advanced catalyst “bottom-up” synthesis
journal
June 2016
Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing
journal
January 2003
AVD and ALD as Two Complementary Technology Solutions for Next Generation Dielectric and Conductive Thin-Film Processing
journal
March 2006
Atomic Layer Deposition of High- k Oxides of the Group 4 Metals for Memory Applications
journal
April 2009
Applications of atomic layer deposition to nanofabrication and emerging nanodevices
journal
February 2009
ALD Applications Beyond Outside IC Technology - Existing and Emerging Possibilities
conference
January 2009
Emerging Applications of Atomic Layer Deposition for Lithium-Ion Battery Studies
journal
June 2012
Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing
journal
June 2012
A brief review of atomic layer deposition: from fundamentals to applications
journal
June 2014
Nanoscale Structuring of Surfaces by Using Atomic Layer Deposition
journal
November 2015
Atomic layer deposition for nanomaterial synthesis and functionalization in energy technology
journal
January 2017
Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes
Sharma, Kashish; Routkevitch, Dmitri; Varaksa, Natalia
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 34, Issue 1
https://doi.org/10.1116/1.4937728
journal
December 2015
A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches
journal
March 2003
Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition
journal
September 2003
Modeling the Conformality of Atomic Layer Deposition: The Effect of Sticking Probability
journal
January 2009
Method to determine the sticking coefficient of precursor molecules in atomic layer deposition
journal
April 2009
Modeling precursor diffusion and reaction of atomic layer deposition in porous structures
Keuter, Thomas; Menzler, Norbert Heribert; Mauer, Georg
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 1, Article No. 01A104
https://doi.org/10.1116/1.4892385
journal
January 2015
Transient ALD simulations for a multi-wafer reactor with trenched wafers
journal
September 2007
Atomic layer deposition of TiO2 on mesoporous silica
journal
September 2006
Tailoring nanoporous materials by atomic layer deposition
journal
January 2011
Atomic Layer Deposition-Modified Ordered Mesoporous Silica Membranes
journal
March 2012
Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition
Zemtsova, Elena G.; Arbenin, Andrei Yu.; Plotnikov, Alexander F.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 2
https://doi.org/10.1116/1.4907989
journal
March 2015
Atomic Layer Deposition of TiO 2 on Graphene for Supercapacitors
journal
January 2012
Synthesis of ZnO quantum dot/graphene nanocomposites by atomic layer deposition with high lithium storage capacity
journal
January 2014
Nanostructured materials for applications in heterogeneous catalysis
journal
January 2013
Synthesis and Stabilization of Supported Metal Catalysts by Atomic Layer Deposition
journal
March 2013
Stabilization of Copper Catalysts for Liquid-Phase Reactions by Atomic Layer Deposition
journal
November 2013
Shape-Controlled Nanostructures in Heterogeneous Catalysis
journal
September 2013
Nanoengineering Heterogeneous Catalysts by Atomic Layer Deposition
journal
June 2017
Sub-Monolayer Control of Mixed-Oxide Support Composition in Catalysts via Atomic Layer Deposition: Selective Hydrogenation of Cinnamaldehyde Promoted by (SiO 2 -ALD)-Pt/Al 2 O 3
journal
August 2018
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
journal
June 2005
Quartz Crystal Microbalance Studies of Al 2 O 3 Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C †
journal
January 2010
Aluminium atomic layer deposition applied to mesoporous zeolites for acid catalytic activity enhancement
journal
January 2011
Alumina Over-coating on Pd Nanoparticle Catalysts by Atomic Layer Deposition: Enhanced Stability and Reactivity
journal
January 2011
Characteristics of TiOx films prepared by chemical vapor deposition using tetrakis-dimethyl-amido-titanium and water
journal
March 2006
Atomic layer deposition of TiO2 from tetrakis-dimethyl-amido titanium or Ti isopropoxide precursors and H2O
journal
October 2007
Atomic layer deposition of TiO 2 from tetrakis(dimethylamino)titanium and H 2 O
journal
October 2013
Wafer-scale fabrication of conformal atomic-layered TiO2 by atomic layer deposition using tetrakis (dimethylamino) titanium and H2O precursors
journal
April 2017
Advances in deposition processes for passivation films
journal
September 1977
Low-temperature synthesis of nanoscale silica multilayers – atomic layer deposition in a test tube
journal
January 2010
Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions
journal
February 2000
ALD of SiO[sub 2] at Room Temperature Using TEOS and H[sub 2]O with NH[sub 3] as the Catalyst
journal
January 2004
Selectively functionalized mesoporous silica particles with the PEGylated outer surface and the doxorubicin-grafted inner surface: Improvement of loading content and solubility
journal
May 2013
The Determination of Pore Volume and Area Distributions in Porous Substances. I. Computations from Nitrogen Isotherms
journal
January 1951
Reporting physisorption data for gas/solid systems with special reference to the determination of surface area and porosity (Recommendations 1984)
journal
January 1985
Adsorption of Gases in Multimolecular Layers
journal
February 1938
Low-Temperature Al2 O3 Atomic Layer Deposition
journal
February 2004
Atomic Layer Deposition of Aluminum Oxide in Mesoporous Silica Gel
journal
September 2010
Stepwise Pore Size Reduction of Ordered Nanoporous Silica Materials at Angstrom Precision
journal
May 2013
Surface structuring of mesoporous materials by controlled synthesis of nanocavities
journal
November 2016
Highly efficient CoO x /SBA-15 catalysts prepared by atomic layer deposition for the epoxidation reaction of styrene
journal
January 2017
A new family of mesoporous molecular sieves prepared with liquid crystal templates
journal
December 1992
Cubic Mesoporous Silica with Large Controllable Entrance Sizes and Advanced Adsorption Properties
journal
July 2003