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Title: Gas-Phase Electron-Impact Activation of Atomic Layer Deposition (ALD) Precursors: MeCpPtMe 3

Abstract

Not provided.

Authors:
 [1];  [2];  [1]; ORCiD logo [2]; ORCiD logo [1]
  1. Department of Chemistry, University of California, Riverside, California 02521, United States
  2. Department of Chemistry and Biochemistry, University of Delaware, Newark, Delaware 19716, United States
Publication Date:
Research Org.:
Univ. of California, Riverside, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1539341
DOE Contract Number:  
SC0001839
Resource Type:
Journal Article
Journal Name:
Journal of Physical Chemistry Letters
Additional Journal Information:
Journal Volume: 9; Journal Issue: 16; Journal ID: ISSN 1948-7185
Publisher:
American Chemical Society
Country of Publication:
United States
Language:
English
Subject:
Chemistry; Science & Technology - Other Topics; Materials Science; Physics

Citation Formats

Lien, Clinton, Konh, Mahsa, Chen, Bo, Teplyakov, Andrew V., and Zaera, Francisco. Gas-Phase Electron-Impact Activation of Atomic Layer Deposition (ALD) Precursors: MeCpPtMe 3. United States: N. p., 2018. Web. doi:10.1021/acs.jpclett.8b02125.
Lien, Clinton, Konh, Mahsa, Chen, Bo, Teplyakov, Andrew V., & Zaera, Francisco. Gas-Phase Electron-Impact Activation of Atomic Layer Deposition (ALD) Precursors: MeCpPtMe 3. United States. doi:10.1021/acs.jpclett.8b02125.
Lien, Clinton, Konh, Mahsa, Chen, Bo, Teplyakov, Andrew V., and Zaera, Francisco. Wed . "Gas-Phase Electron-Impact Activation of Atomic Layer Deposition (ALD) Precursors: MeCpPtMe 3". United States. doi:10.1021/acs.jpclett.8b02125.
@article{osti_1539341,
title = {Gas-Phase Electron-Impact Activation of Atomic Layer Deposition (ALD) Precursors: MeCpPtMe 3},
author = {Lien, Clinton and Konh, Mahsa and Chen, Bo and Teplyakov, Andrew V. and Zaera, Francisco},
abstractNote = {Not provided.},
doi = {10.1021/acs.jpclett.8b02125},
journal = {Journal of Physical Chemistry Letters},
issn = {1948-7185},
number = 16,
volume = 9,
place = {United States},
year = {2018},
month = {8}
}