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Title: Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy

Abstract

Not provided.

Authors:
; ; ORCiD logo; ; ; ORCiD logo
Publication Date:
Research Org.:
Sinmat, Inc., Gainesville, FL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1538883
DOE Contract Number:  
SC0004190; SC0006438; SC0007740
Resource Type:
Journal Article
Journal Name:
Thin Solid Films
Additional Journal Information:
Journal Volume: 660; Journal Issue: C; Journal ID: ISSN 0040-6090
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
Materials Science; Physics

Citation Formats

Lee, Jinhyung, Kim, Jong Cheol, Kim, Jongsik, Singh, Rajiv K., Arjunan, Arul C., and Lee, Haigun. Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy. United States: N. p., 2018. Web. doi:10.1016/j.tsf.2018.07.002.
Lee, Jinhyung, Kim, Jong Cheol, Kim, Jongsik, Singh, Rajiv K., Arjunan, Arul C., & Lee, Haigun. Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy. United States. doi:10.1016/j.tsf.2018.07.002.
Lee, Jinhyung, Kim, Jong Cheol, Kim, Jongsik, Singh, Rajiv K., Arjunan, Arul C., and Lee, Haigun. Wed . "Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy". United States. doi:10.1016/j.tsf.2018.07.002.
@article{osti_1538883,
title = {Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy},
author = {Lee, Jinhyung and Kim, Jong Cheol and Kim, Jongsik and Singh, Rajiv K. and Arjunan, Arul C. and Lee, Haigun},
abstractNote = {Not provided.},
doi = {10.1016/j.tsf.2018.07.002},
journal = {Thin Solid Films},
issn = {0040-6090},
number = C,
volume = 660,
place = {United States},
year = {2018},
month = {8}
}