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Title: Sputtering in a high-flux plasma environment

Abstract

Not provided.

Authors:
Publication Date:
Research Org.:
Univ. of California, San Diego, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1538791
DOE Contract Number:  
FG02-07ER54912
Resource Type:
Journal Article
Journal Name:
Scripta Materialia
Additional Journal Information:
Journal Volume: 143; Journal Issue: C; Journal ID: ISSN 1359-6462
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
Science & Technology - Other Topics; Materials Science; Metallurgy & Metallurgical Engineering

Citation Formats

Doerner, R. P. Sputtering in a high-flux plasma environment. United States: N. p., 2018. Web. doi:10.1016/j.scriptamat.2017.06.045.
Doerner, R. P. Sputtering in a high-flux plasma environment. United States. doi:10.1016/j.scriptamat.2017.06.045.
Doerner, R. P. Mon . "Sputtering in a high-flux plasma environment". United States. doi:10.1016/j.scriptamat.2017.06.045.
@article{osti_1538791,
title = {Sputtering in a high-flux plasma environment},
author = {Doerner, R. P.},
abstractNote = {Not provided.},
doi = {10.1016/j.scriptamat.2017.06.045},
journal = {Scripta Materialia},
issn = {1359-6462},
number = C,
volume = 143,
place = {United States},
year = {2018},
month = {1}
}