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Title: Characterization of inductively coupled plasma generated by a quadruple antenna

Abstract

Not provided.

Authors:
; ORCiD logo; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Univ. of Michigan, Ann Arbor, MI (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1535525
DOE Contract Number:  
SC0001939
Resource Type:
Journal Article
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 26; Journal Issue: 2; Journal ID: ISSN 1361-6595
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English
Subject:
Physics

Citation Formats

Shafir, G., Zolotukhin, D., Godyak, V., Shlapakovski, A., Gleizer, S., Slutsker, Ya, Gad, R., Bernshtam, V., Ralchenko, Yu, and Krasik, Ya E. Characterization of inductively coupled plasma generated by a quadruple antenna. United States: N. p., 2017. Web. doi:10.1088/1361-6595/aa5300.
Shafir, G., Zolotukhin, D., Godyak, V., Shlapakovski, A., Gleizer, S., Slutsker, Ya, Gad, R., Bernshtam, V., Ralchenko, Yu, & Krasik, Ya E. Characterization of inductively coupled plasma generated by a quadruple antenna. United States. doi:10.1088/1361-6595/aa5300.
Shafir, G., Zolotukhin, D., Godyak, V., Shlapakovski, A., Gleizer, S., Slutsker, Ya, Gad, R., Bernshtam, V., Ralchenko, Yu, and Krasik, Ya E. Tue . "Characterization of inductively coupled plasma generated by a quadruple antenna". United States. doi:10.1088/1361-6595/aa5300.
@article{osti_1535525,
title = {Characterization of inductively coupled plasma generated by a quadruple antenna},
author = {Shafir, G. and Zolotukhin, D. and Godyak, V. and Shlapakovski, A. and Gleizer, S. and Slutsker, Ya and Gad, R. and Bernshtam, V. and Ralchenko, Yu and Krasik, Ya E.},
abstractNote = {Not provided.},
doi = {10.1088/1361-6595/aa5300},
journal = {Plasma Sources Science and Technology},
issn = {1361-6595},
number = 2,
volume = 26,
place = {United States},
year = {2017},
month = {1}
}