Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy
Abstract
Not provided.
- Authors:
-
- Department of Chemistry and ‡Center for Catalysis and Surface Science, Northwestern University, Evanston, Illinois 60208, United States
- Publication Date:
- Research Org.:
- Northwestern Univ., Evanston, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1534997
- DOE Contract Number:
- FG02-03ER15457
- Resource Type:
- Journal Article
- Journal Name:
- Journal of the American Chemical Society
- Additional Journal Information:
- Journal Volume: 139; Journal Issue: 6; Journal ID: ISSN 0002-7863
- Publisher:
- American Chemical Society (ACS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- Chemistry
Citation Formats
Hackler, Ryan A., McAnally, Michael O., Schatz, George C., Stair, Peter C., and Van Duyne, Richard P. Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy. United States: N. p., 2017.
Web. doi:10.1021/jacs.6b12709.
Hackler, Ryan A., McAnally, Michael O., Schatz, George C., Stair, Peter C., & Van Duyne, Richard P. Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy. United States. https://doi.org/10.1021/jacs.6b12709
Hackler, Ryan A., McAnally, Michael O., Schatz, George C., Stair, Peter C., and Van Duyne, Richard P. 2017.
"Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy". United States. https://doi.org/10.1021/jacs.6b12709.
@article{osti_1534997,
title = {Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy},
author = {Hackler, Ryan A. and McAnally, Michael O. and Schatz, George C. and Stair, Peter C. and Van Duyne, Richard P.},
abstractNote = {Not provided.},
doi = {10.1021/jacs.6b12709},
url = {https://www.osti.gov/biblio/1534997},
journal = {Journal of the American Chemical Society},
issn = {0002-7863},
number = 6,
volume = 139,
place = {United States},
year = {Tue Feb 07 00:00:00 EST 2017},
month = {Tue Feb 07 00:00:00 EST 2017}
}
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