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Title: Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy

Abstract

Not provided.

Authors:
ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1];  [1]; ORCiD logo [1]
  1. Department of Chemistry and ‡Center for Catalysis and Surface Science, Northwestern University, Evanston, Illinois 60208, United States
Publication Date:
Research Org.:
Northwestern Univ., Evanston, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1534997
DOE Contract Number:  
FG02-03ER15457
Resource Type:
Journal Article
Journal Name:
Journal of the American Chemical Society
Additional Journal Information:
Journal Volume: 139; Journal Issue: 6; Journal ID: ISSN 0002-7863
Publisher:
American Chemical Society (ACS)
Country of Publication:
United States
Language:
English
Subject:
Chemistry

Citation Formats

Hackler, Ryan A., McAnally, Michael O., Schatz, George C., Stair, Peter C., and Van Duyne, Richard P. Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy. United States: N. p., 2017. Web. doi:10.1021/jacs.6b12709.
Hackler, Ryan A., McAnally, Michael O., Schatz, George C., Stair, Peter C., & Van Duyne, Richard P. Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy. United States. doi:10.1021/jacs.6b12709.
Hackler, Ryan A., McAnally, Michael O., Schatz, George C., Stair, Peter C., and Van Duyne, Richard P. Tue . "Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy". United States. doi:10.1021/jacs.6b12709.
@article{osti_1534997,
title = {Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy},
author = {Hackler, Ryan A. and McAnally, Michael O. and Schatz, George C. and Stair, Peter C. and Van Duyne, Richard P.},
abstractNote = {Not provided.},
doi = {10.1021/jacs.6b12709},
journal = {Journal of the American Chemical Society},
issn = {0002-7863},
number = 6,
volume = 139,
place = {United States},
year = {2017},
month = {2}
}