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Title: Silicon wafers with optically specular surfaces formed by chemical polishing

Abstract

Not provided.

Authors:
; ; ;
Publication Date:
Research Org.:
Arizona State Univ., Tempe, AZ (United States)
Sponsoring Org.:
USDOE Advanced Research Projects Agency - Energy (ARPA-E)
OSTI Identifier:
1533356
DOE Contract Number:  
AR0000474
Resource Type:
Journal Article
Journal Name:
Journal of Materials Science Materials in Electronics
Additional Journal Information:
Journal Volume: 27; Journal Issue: 10; Journal ID: ISSN 0957-4522
Publisher:
Springer
Country of Publication:
United States
Language:
English
Subject:
Engineering; Materials Science; Physics

Citation Formats

Yu, Zhengshan J., Wheelwright, Brian M., Manzoor, Salman, and Holman, Zachary C. Silicon wafers with optically specular surfaces formed by chemical polishing. United States: N. p., 2016. Web. doi:10.1007/s10854-016-5108-y.
Yu, Zhengshan J., Wheelwright, Brian M., Manzoor, Salman, & Holman, Zachary C. Silicon wafers with optically specular surfaces formed by chemical polishing. United States. doi:10.1007/s10854-016-5108-y.
Yu, Zhengshan J., Wheelwright, Brian M., Manzoor, Salman, and Holman, Zachary C. Mon . "Silicon wafers with optically specular surfaces formed by chemical polishing". United States. doi:10.1007/s10854-016-5108-y.
@article{osti_1533356,
title = {Silicon wafers with optically specular surfaces formed by chemical polishing},
author = {Yu, Zhengshan J. and Wheelwright, Brian M. and Manzoor, Salman and Holman, Zachary C.},
abstractNote = {Not provided.},
doi = {10.1007/s10854-016-5108-y},
journal = {Journal of Materials Science Materials in Electronics},
issn = {0957-4522},
number = 10,
volume = 27,
place = {United States},
year = {2016},
month = {6}
}