Method of making and structure of multilayer laue lens for focusing hard x-rays
Abstract
A zone plate multilayer structure includes a substrate carrying a plurality of alternating layers respectively formed of tungsten silicide (WSi2) and silicon (Si). The alternating layers are sequentially deposited precisely controlling a thickness of each layer from a minimum thickness of a first deposited layer adjacent the substrate to a maximum thickness of a last deposited layer. The first minimum thickness layer has a selected thickness of less than or equal to 5 nm with the thickness of the alternating layers monotonically increasing to provide a zone plate multilayer structure having a thickness of greater than 12 μm (microns). The x-rays are diffracted in Laue transmission geometry by the specific arrangement of silicon and tungsten silicide.
- Inventors:
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531570
- Patent Number(s):
- 7,440,546
- Application Number:
- 11/634,681
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- DOE Contract Number:
- AC02-06CH11357; W-31-109-ENG-38
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2006-12-06
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Citation Formats
Liu, Chian Q., Conley, Raymond P., Macrander, Albert T., Kang, Hyon Chol, Stephenson, G. Brian, and Maser, Jorg. Method of making and structure of multilayer laue lens for focusing hard x-rays. United States: N. p., 2008.
Web.
Liu, Chian Q., Conley, Raymond P., Macrander, Albert T., Kang, Hyon Chol, Stephenson, G. Brian, & Maser, Jorg. Method of making and structure of multilayer laue lens for focusing hard x-rays. United States.
Liu, Chian Q., Conley, Raymond P., Macrander, Albert T., Kang, Hyon Chol, Stephenson, G. Brian, and Maser, Jorg. Tue .
"Method of making and structure of multilayer laue lens for focusing hard x-rays". United States. https://www.osti.gov/servlets/purl/1531570.
@article{osti_1531570,
title = {Method of making and structure of multilayer laue lens for focusing hard x-rays},
author = {Liu, Chian Q. and Conley, Raymond P. and Macrander, Albert T. and Kang, Hyon Chol and Stephenson, G. Brian and Maser, Jorg},
abstractNote = {A zone plate multilayer structure includes a substrate carrying a plurality of alternating layers respectively formed of tungsten silicide (WSi2) and silicon (Si). The alternating layers are sequentially deposited precisely controlling a thickness of each layer from a minimum thickness of a first deposited layer adjacent the substrate to a maximum thickness of a last deposited layer. The first minimum thickness layer has a selected thickness of less than or equal to 5 nm with the thickness of the alternating layers monotonically increasing to provide a zone plate multilayer structure having a thickness of greater than 12 μm (microns). The x-rays are diffracted in Laue transmission geometry by the specific arrangement of silicon and tungsten silicide.},
doi = {},
url = {https://www.osti.gov/biblio/1531570},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {10}
}