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Title: Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

Abstract

The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.

Inventors:
; ; ;
Publication Date:
Research Org.:
Harvard Univ., Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531567
Patent Number(s):
7,435,353
Application Number:
11/008,402
Assignee:
President and Fellows of Harvard College (Cambridge, MA)
DOE Contract Number:  
FG02-01ER45922
Resource Type:
Patent
Resource Relation:
Patent File Date: 2004-12-09
Country of Publication:
United States
Language:
English

Citation Formats

Golovchenko, Jene A., King, Gavin M., Schrmann, Gregor M., and Branton, Daniel. Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers. United States: N. p., 2008. Web.
Golovchenko, Jene A., King, Gavin M., Schrmann, Gregor M., & Branton, Daniel. Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers. United States.
Golovchenko, Jene A., King, Gavin M., Schrmann, Gregor M., and Branton, Daniel. 2008. "Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers". United States. https://www.osti.gov/servlets/purl/1531567.
@article{osti_1531567,
title = {Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers},
author = {Golovchenko, Jene A. and King, Gavin M. and Schrmann, Gregor M. and Branton, Daniel},
abstractNote = {The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.},
doi = {},
url = {https://www.osti.gov/biblio/1531567}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 14 00:00:00 EDT 2008},
month = {Tue Oct 14 00:00:00 EDT 2008}
}

Works referenced in this record:

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Methods for modifying surfaces
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Dependence of the dissolution characteristics of As2S3 as a photoresist on the condensation rate and evaporation temperature
journal, May 1989


Thickness dependent crystallization kinetics of sub-micron amorphous solid water films
journal, March 2003


Works referencing / citing this record:

Nanotube processing employing solid-condensed-gas-layers
patent, September 2012


Method of lift-off patterning thin films in situ employing phase change resists
patent, September 2014


Electron beam processing with condensed ice
patent, July 2014