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Title: Methods for forming composite coatings on MEMS devices

Abstract

The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.

Inventors:
Publication Date:
Research Org.:
MicroSurfaces, Inc., Minneapolis, MN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531525
Patent Number(s):
7,201,937
Application Number:
10/641,547
Assignee:
MicroSurfaces, Inc. (Minneapolis, MN)
DOE Contract Number:  
BE-7471
Resource Type:
Patent
Resource Relation:
Patent File Date: 2003-08-15
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Zhu, Xiaoyang. Methods for forming composite coatings on MEMS devices. United States: N. p., 2007. Web.
Zhu, Xiaoyang. Methods for forming composite coatings on MEMS devices. United States.
Zhu, Xiaoyang. Tue . "Methods for forming composite coatings on MEMS devices". United States. https://www.osti.gov/servlets/purl/1531525.
@article{osti_1531525,
title = {Methods for forming composite coatings on MEMS devices},
author = {Zhu, Xiaoyang},
abstractNote = {The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {4}
}

Patent:

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Works referenced in this record:

Process for the photochemical vapor deposition of siloxane polymers
patent, November 1988


Method of applying a monolayer lubricant to micromachines
patent, April 1995


Molecular Orientation and Grafting Density in Semifluorinated Self-Assembled Monolayers of Mono-, Di-, and Trichloro Silanes on Silica Substrates
journal, November 2002

  • Genzer, Jan; Efimenko, Kirill; Fischer, Daniel A.
  • Langmuir, Vol. 18, Issue 24
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Methods of forming microstructure devices
patent, June 2003


Surface processes in MEMS technology
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The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers
journal, October 2000

  • Bunker, B. C.; Carpick, R. W.; Assink, R. A.
  • Langmuir, Vol. 16, Issue 20
  • DOI: 10.1021/la000502q

Adhesion hysteresis of silane coated microcantilevers
journal, December 2000