Methods for forming composite coatings on MEMS devices

Zhu, Xiaoyang

Methods for forming composite coatings on MEMS devices

Patent · 10 April 2007

OSTI ID:1531525

Zhu, Xiaoyang

The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.

Research Organization:: MicroSurfaces, Inc., Minneapolis, MN (United States)

Sponsoring Organization:: USDOE

Assignee:: MicroSurfaces, Inc. (Minneapolis, MN)

Patent Number(s):: 7,201,937

Application Number:: 10/641,547

OSTI ID:: 1531525

Country of Publication:: United States

Language:: English

References (6)

Surface processes in MEMS technology Maboudian, R. Surface Science Reports, Vol. 30, Issue 6-8 https://doi.org/10.1016/S0167-5729(97)00014-9	journal	January 1998
Adhesion hysteresis of silane coated microcantilevers de Boer, M. P.; Knapp, J. A.; Michalske, T. A. Acta Materialia, Vol. 48, Issue 18-19 https://doi.org/10.1016/S1359-6454(00)00239-1	journal	December 2000
Self-Assembly Is Not the Only Reaction Possible between Alkyltrichlorosilanes and Surfaces: Monomolecular and Oligomeric Covalently Attached Layers of Dichloro- and Trichloroalkylsilanes on Silicon Fadeev, Alexander Y.; McCarthy, Thomas J. Langmuir, Vol. 16, Issue 18 https://doi.org/10.1021/la000471z	journal	September 2000
Molecular Orientation and Grafting Density in Semifluorinated Self-Assembled Monolayers of Mono-, Di-, and Trichloro Silanes on Silica Substrates Genzer, Jan; Efimenko, Kirill; Fischer, Daniel A. Langmuir, Vol. 18, Issue 24 https://doi.org/10.1021/la025921x	journal	November 2002
The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers Bunker, B. C.; Carpick, R. W.; Assink, R. A. Langmuir, Vol. 16, Issue 20 https://doi.org/10.1021/la000502q	journal	October 2000
The influence of coating structure on micromachine stiction Kushmerick, J. G.; Hankins, M. G.; de Boer, M. P. Tribology Letters, Vol. 10, Issue 1/2, p. 103-108 https://doi.org/10.1023/A:1009082530479	journal	January 2001

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Methods for forming composite coatings on MEMS devices

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