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Title: Methods for forming composite coatings on MEMS devices

Abstract

The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.

Inventors:
Publication Date:
Research Org.:
MicroSurfaces, Inc., Minneapolis, MN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531525
Patent Number(s):
7,201,937
Application Number:
10/641,547
Assignee:
MicroSurfaces, Inc. (Minneapolis, MN)
DOE Contract Number:  
BE-7471
Resource Type:
Patent
Resource Relation:
Patent File Date: 2003-08-15
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Zhu, Xiaoyang. Methods for forming composite coatings on MEMS devices. United States: N. p., 2007. Web.
Zhu, Xiaoyang. Methods for forming composite coatings on MEMS devices. United States.
Zhu, Xiaoyang. 2007. "Methods for forming composite coatings on MEMS devices". United States. https://www.osti.gov/servlets/purl/1531525.
@article{osti_1531525,
title = {Methods for forming composite coatings on MEMS devices},
author = {Zhu, Xiaoyang},
abstractNote = {The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.},
doi = {},
url = {https://www.osti.gov/biblio/1531525}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {4}
}

Works referenced in this record:

Method of applying a monolayer lubricant to micromachines
patent, April 1995


Methods of forming microstructure devices
patent, June 2003


Surface processes in MEMS technology
journal, January 1998


The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers
journal, October 2000


Adhesion hysteresis of silane coated microcantilevers
journal, December 2000