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Title: Methods for forming composite coatings on MEMS devices

Patent ·
OSTI ID:1531525

The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.

Research Organization:
MicroSurfaces, Inc., Minneapolis, MN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
BE-7471
Assignee:
MicroSurfaces, Inc. (Minneapolis, MN)
Patent Number(s):
7,201,937
Application Number:
10/641,547
OSTI ID:
1531525
Resource Relation:
Patent File Date: 2003-08-15
Country of Publication:
United States
Language:
English

References (12)

Process for the photochemical vapor deposition of siloxane polymers patent November 1988
Method of applying a monolayer lubricant to micromachines patent April 1995
Method of coating micro-electromechanical devices patent-application February 2004
Materials and methods for forming hybrid organic-inorganic anti-stiction materials for micro-electromechanical systems patent-application January 2004
Molecular Orientation and Grafting Density in Semifluorinated Self-Assembled Monolayers of Mono-, Di-, and Trichloro Silanes on Silica Substrates journal November 2002
Methods of forming microstructure devices patent June 2003
The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers journal October 2000
Methods for forming coatings on MEMS devices patent-application April 2004
Adhesion hysteresis of silane coated microcantilevers journal December 2000
The influence of coating structure on micromachine stiction journal January 2001
Self-Assembly Is Not the Only Reaction Possible between Alkyltrichlorosilanes and Surfaces:  Monomolecular and Oligomeric Covalently Attached Layers of Dichloro- and Trichloroalkylsilanes on Silicon journal September 2000
Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor patent January 2004

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