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Title: Study on an effective one-dimensional ion-beam figuring method

Abstract

Ion-beam figuring (IBF) is a precise surface finishing technique used for the production of ultra-precision optical surfaces. In this study, we propose an effective one-dimensional IBF (1D-IBF) method approaching sub-nanometer root mean square (RMS) convergence for flat and spherical mirrors. Our process contains three key aspects. First, to minimize the misalignment of the coordinate systems between the metrology and the IBF hardware, a mirror holder is used to integrate both the sample mirror and the beam removal function (BRF) mirror. In this way, the coordinate relationship can be calculated using the measured BRF center. Second, we propose a novel constrained linear least-squares (CLLS) dwell time calculation algorithm combined with a coarse-to-fine scheme to ensure that the resultant nonnegative dwell time closely and smoothly duplicates the required removal amount. Third, considering the possible errors induced by the translation stage, we propose a dwell time slicing strategy to divide the dwell time into smaller time slices. Experiments using our approaches are performed on flat and spherical mirrors as demonstrations. Measurement results from the nano-accuracy surface profiler (NSP) show that the residual profile errors are reduced to sub-nanometer RMS for both types of mirrors while the surface roughness is not affected by themore » figuring process, demonstrating the effectiveness of the proposed 1D-IBF method for 1D high-precision optics fabrication.« less

Authors:
ORCiD logo; ORCiD logo; ; ; ; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1512553
Alternate Identifier(s):
OSTI ID: 1543406
Report Number(s):
BNL-211885-2019-JAAM
Journal ID: ISSN 1094-4087; OPEXFF
Grant/Contract Number:  
BNL LDRD 17-016; SC0012704
Resource Type:
Journal Article: Published Article
Journal Name:
Optics Express
Additional Journal Information:
Journal Name: Optics Express Journal Volume: 27 Journal Issue: 11; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Wang, Tianyi, Huang, Lei, Vescovi, Matthew, Kuhne, Dennis, Tayabaly, Kashmira, Bouet, Nathalie, and Idir, Mourad. Study on an effective one-dimensional ion-beam figuring method. United States: N. p., 2019. Web. doi:10.1364/OE.27.015368.
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Wang, Tianyi, Huang, Lei, Vescovi, Matthew, Kuhne, Dennis, Tayabaly, Kashmira, Bouet, Nathalie, & Idir, Mourad. Study on an effective one-dimensional ion-beam figuring method. United States. https://doi.org/10.1364/OE.27.015368
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Wang, Tianyi, Huang, Lei, Vescovi, Matthew, Kuhne, Dennis, Tayabaly, Kashmira, Bouet, Nathalie, and Idir, Mourad. Tue . "Study on an effective one-dimensional ion-beam figuring method". United States. https://doi.org/10.1364/OE.27.015368.
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@article{osti_1512553,
title = {Study on an effective one-dimensional ion-beam figuring method},
author = {Wang, Tianyi and Huang, Lei and Vescovi, Matthew and Kuhne, Dennis and Tayabaly, Kashmira and Bouet, Nathalie and Idir, Mourad},
abstractNote = {Ion-beam figuring (IBF) is a precise surface finishing technique used for the production of ultra-precision optical surfaces. In this study, we propose an effective one-dimensional IBF (1D-IBF) method approaching sub-nanometer root mean square (RMS) convergence for flat and spherical mirrors. Our process contains three key aspects. First, to minimize the misalignment of the coordinate systems between the metrology and the IBF hardware, a mirror holder is used to integrate both the sample mirror and the beam removal function (BRF) mirror. In this way, the coordinate relationship can be calculated using the measured BRF center. Second, we propose a novel constrained linear least-squares (CLLS) dwell time calculation algorithm combined with a coarse-to-fine scheme to ensure that the resultant nonnegative dwell time closely and smoothly duplicates the required removal amount. Third, considering the possible errors induced by the translation stage, we propose a dwell time slicing strategy to divide the dwell time into smaller time slices. Experiments using our approaches are performed on flat and spherical mirrors as demonstrations. Measurement results from the nano-accuracy surface profiler (NSP) show that the residual profile errors are reduced to sub-nanometer RMS for both types of mirrors while the surface roughness is not affected by the figuring process, demonstrating the effectiveness of the proposed 1D-IBF method for 1D high-precision optics fabrication.},
doi = {10.1364/OE.27.015368},
url = {https://www.osti.gov/biblio/1512553}, journal = {Optics Express},
issn = {1094-4087},
number = 11,
volume = 27,
place = {United States},
year = {2019},
month = {5}
}
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Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at https://doi.org/10.1364/OE.27.015368
Copyright Statement
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Citation Metrics:
Cited by: 5 works
Citation information provided by
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Figures / Tables:

Fig. 1 Fig. 1: The 1D-IBF hardware used in this study. (a) The multi-layer deposition system at NSLS-II optical metrology and fabrication group. (b) The rectangular grid installed to modify the shape of the ion beam.
All figures and tables (11 total)
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Works referenced in this record:

Dwell time algorithm in ion beam figuring
journal, January 2009

A one-dimensional ion beam figuring system for x-ray mirror fabrication
journal, October 2015

One-dimensional ion-beam figuring for grazing-incidence reflective optics
journal, January 2016

Ion beam etching of a flat silicon mirror surface: A study of the shape error evolution
journal, May 2013

  • Preda, I.; Vivo, A.; Demarcq, F.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 710
  • https://doi.org/10.1016/j.nima.2012.10.136

New figuring model based on surface slope profile for grazing-incidence reflective optics
journal, August 2016

Neutral Ion Beam Figuring Of Large Optical Surfaces
conference, January 1987

Algorithm for ion beam figuring of low-gradient mirrors
journal, January 2009

qpOASES: a parametric active-set algorithm for quadratic programming
journal, April 2014

Advanced matrix-based algorithm for ion-beam milling of optical components
conference, December 1992

Contouring algorithm for ion figuring
journal, January 1995

Ion beam milling of fused silica for window fabrication
conference, June 1991

Demonstration of an ion-figuring process
conference, November 1990

Ion beam figuring (IBF) for high precision optics
conference, February 2010

Ion beam figuring machine for ultra-precision silicon spheres correction
journal, July 2015

Innovative nano-accuracy surface profiler for sub-50 nrad rms mirror test
conference, October 2016

  • Qian, Shinan; Idir, Mourad
  • Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), SPIE Proceedings
  • https://doi.org/10.1117/12.2247575

The NSLS-II multilayer Laue lens deposition system
conference, August 2009

Ion beam figuring for lithography optics
journal, May 2009

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    Works referencing / citing this record:

    Ion beam figuring and optical metrology system for synchrotron x-ray mirrors
    conference, September 2019

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      Figures / Tables found in this record:

      Fig. 1(p. 4)figure
      Fig. 2(p. 5)figure
      Fig. 3(p. 6)figure
      Fig. 4(p. 7)figure
      Fig. 5(p. 10)figure
      Fig. 6(p. 11)figure
      Fig. 7(p. 12)figure
      Fig. 8(p. 13)figure
      Fig. 9(p. 13)figure
      Fig. 10(p. 14)figure
      Fig. 11(p. 14)figure
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        Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.

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