Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

Tong, Liuchuan; Davis, Luke M.; Gong, Xian; Feng, Jun; Beh, Eugene S.; Gordon, Roy G.

doi:10.1039/C9DT01202H

Title: Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

Journal Article · Tue May 21 00:00:00 EDT 2019 · Dalton Transactions

DOI:https://doi.org/10.1039/C9DT01202H· OSTI ID:1511063

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Department of Chemistry and Chemical Biology, Harvard University, Cambridge, USA
Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, USA
Department of Chemistry and Chemical Biology, Harvard University, Cambridge, USA, Harvard John A. Paulson School of Engineering and Applied Sciences

Coinage metal bicyclic amidinates for chemical vapor deposition.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: AC36-08GO28308

OSTI ID:: 1511063

Journal Information:: Dalton Transactions, Journal Name: Dalton Transactions Vol. 48 Journal Issue: 20; ISSN 1477-9226

Publisher:: Royal Society of Chemistry (RSC)Copyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 3 works

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References (38)

New Liquid Precursors for the Metal-organic CVD of Gold Films Parkhomenko, Roman G.; Turgambaeva, Asiya E.; Morozova, Natalia B. Chemical Vapor Deposition, Vol. 19, Issue 1-3 https://doi.org/10.1002/cvde.201207022	journal	February 2013
Synthesis of 5,5-Bicyclic Amidines as Ligands for Thermally Stable Vapor Deposition Precursors Beh, Eugene S.; Tong, Liuchuan; Gordon, Roy G. Organometallics, Vol. 36, Issue 8 https://doi.org/10.1021/acs.organomet.6b00954	journal	April 2017
Synthesis of Cu(II) aminoalkoxide complexes and their unusual thermolysis to Cu(0) Park, Jung Woo; Jang, Hong Suk; Kim, Minchan Inorganic Chemistry Communications, Vol. 7, Issue 4 https://doi.org/10.1016/j.inoche.2003.12.022	journal	April 2004
Synthesis, structural characterization, and properties of chromium( iii ) complexes containing amidinato ligands and η ² -pyrazolato, η ² -1,2,4-triazolato, or η ¹ -tetrazolato ligands El-Kadri, Oussama M.; Heeg, Mary Jane; Winter, Charles H. Dalton Trans., Issue 37 https://doi.org/10.1039/B607903B	journal	January 2006
Group 11 Amidinates and Guanidinates: Potential Precursors for Vapour Deposition Whitehorne, Todd J. J.; Coyle, Jason P.; Mahmood, Ahsan European Journal of Inorganic Chemistry, Vol. 2011, Issue 21 https://doi.org/10.1002/ejic.201100262	journal	June 2011
Multinuclear Copper(I) and Silver(I) Amidinate Complexes: Synthesis, Luminescence, and CS ₂ Insertion Reactivity Lane, Andrew C.; Vollmer, Matthew V.; Laber, Charles H. Inorganic Chemistry, Vol. 53, Issue 21 https://doi.org/10.1021/ic501694d	journal	October 2014
Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates Lim, Booyong S.; Rahtu, Antti; Park, Jin-Seong Inorganic Chemistry, Vol. 42, Issue 24 https://doi.org/10.1021/ic0345424	journal	December 2003
Synthesis and X-ray structures of silver and gold guanidinate-like complexes. A Au( ii ) complex with a 2.47 Å Au–Au distance Irwin, Michael D.; Abdou, Hanan E.; Mohamed, Ahmed A. Chem. Commun., Issue 23 https://doi.org/10.1039/B309724M	journal	January 2003
Synthesis and Characterization of Functionalized N,N‘-Diphenylformamidinate Silver(I) Dimers: Solid-State Structures and Solution Properties Archibald, Stephen J.; Alcock, Nathaniel W.; Busch, Daryle H. Inorganic Chemistry, Vol. 38, Issue 24 https://doi.org/10.1021/ic981270+	journal	November 1999
Ag2[Ph – C(NSiMe3)2]2 und Au2[Ph – C(NSiMe3)2]2: Amidinatokomplexe mit kurzen Metall–Metall-Abständen / Ag2[Ph—C(NSiMe3)2]2 and Au2[Ph—C(NSiMe3)2]2: Amidinato Complexes with Short Metal—Metal Distances Fenske, Dieter; Baum, Gerhard; Zinn, Alfred Zeitschrift für Naturforschung B, Vol. 45, Issue 9 https://doi.org/10.1515/znb-1990-0909	journal	September 1990
Remarkably Volatile Copper(II) Complexes of N,N ‘ -Unsymmetrically Substituted 1,3-Diketimines as Precursors for Cu Metal Deposition via CVD or ALD Park, Kyung-Ho; Marshall, Will J. Journal of the American Chemical Society, Vol. 127, Issue 26 https://doi.org/10.1021/ja051158s	journal	July 2005
Tetranuclear Gold(I) Clusters with Nitrogen Donor Ligands: Luminescence and X-Ray Structure of Gold(I) Naphthyl Amidinate Complex Abdou, Hanan E.; Mohamed, Ahmed A.; L�pez-de-Luzuriaga, Jos� M. Journal of Cluster Science, Vol. 15, Issue 4 https://doi.org/10.1007/s10876-004-5764-6	journal	December 2004
Gold(I) Formamidinate Clusters: The Structure, Luminescence, and Electrochemistry of the Tetranuclear, Base-Free [Au ₄ (ArNC(H)NAr) ₄ ] Mohamed, Ahmed A.; Abdou, Hanan E.; Irwin, Michael D. Journal of Cluster Science, Vol. 14, Issue 3 https://doi.org/10.1023/B:JOCL.0000005062.20754.5f	journal	September 2003
Chemical vapor deposition of silver Yuan, Zheng; Dryden, Neil H.; Vittal, Jagadese J. Chemistry of Materials, Vol. 7, Issue 9 https://doi.org/10.1021/cm00057a019	journal	September 1995
AuI and AgI Complexes with Tertiary Phosphines and Perfluorinated Carboxylates as Precursors for CVD of Gold and Silver Szłyk, E.; Piszczek, P.; Łakomska, I. Chemical Vapor Deposition, Vol. 6, Issue 3 https://doi.org/10.1002/(SICI)1521-3862(200006)6:3<105::AID-CVDE105>3.0.CO;2-K	journal	June 2000
Synthesis and X-ray Structures of Dinuclear and Trinuclear Gold(I) and Dinuclear Gold(II) Amidinate Complexes ^† Abdou, Hanan E.; Mohamed, Ahmed A.; Fackler, John P. Inorganic Chemistry, Vol. 44, Issue 2 https://doi.org/10.1021/ic048855q	journal	January 2005
Chemical vapour deposition of copper or silver from the precursors [M(hfac)(CNMe)][M = Cu, Ag; hfac = CF ₃ C(O)CHC(O)CF ₃ ] Yuan, Zheng; Dryden, Neil H.; Li, Xiaorong J. Mater. Chem., Vol. 5, Issue 2 https://doi.org/10.1039/JM9950500303	journal	January 1995
Synthesis and Thermal Chemistry of Copper (I) Guanidinates Coyle, Jason P.; Monillas, Wesley H.; Yap, Glenn P. A. Inorganic Chemistry, Vol. 47, Issue 2 https://doi.org/10.1021/ic701317y	journal	January 2008
Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Reduction to Nickel Films Li, Zhefeng; Gordon, Roy G.; Pallem, Venkateswara Chemistry of Materials, Vol. 22, Issue 10 https://doi.org/10.1021/cm903636j	journal	May 2010
Dinuclear and Tetranuclear Gold−Nitrogen Complexes. Solvent Influences on Oxidation and Nuclearity of Gold Guanidinate Derivatives Mohamed, Ahmed A.; Mayer, Andrew P.; Abdou, Hanan E. Inorganic Chemistry, Vol. 46, Issue 26 https://doi.org/10.1021/ic701399s	journal	December 2007
Silver metal organic chemical vapor deposition for advanced silver metallization Gao, L.; Härter, P.; Linsmeier, Ch. Microelectronic Engineering, Vol. 82, Issue 3-4 https://doi.org/10.1016/j.mee.2005.07.078	journal	December 2005
Atomic layer deposition of transition metals Lim, Booyong S.; Rahtu, Antti; Gordon, Roy G. Nature Materials, Vol. 2, Issue 11 https://doi.org/10.1038/nmat1000	journal	October 2003
The gold–hydrogen bond, Au–H, and the hydrogen bond to gold, Au⋯H–X Schmidbaur, Hubert; Raubenheimer, Helgard G.; Dobrzańska, Liliana Chem. Soc. Rev., Vol. 43, Issue 1 https://doi.org/10.1039/C3CS60251F	journal	January 2014
Atomic Layer Deposition: An Overview George, Steven M. Chemical Reviews, Vol. 110, Issue 1, p. 111-131 https://doi.org/10.1021/cr900056b	journal	January 2010
Synthesis and Characterization of Copper(I) Amidinates as Precursors for Atomic Layer Deposition (ALD) of Copper Metal Li, Zhengwen; Barry, Seán T.; Gordon, Roy G. Inorganic Chemistry, Vol. 44, Issue 6 https://doi.org/10.1021/ic048492u	journal	March 2005
Water as an Ideal Solvent for the Synthesis of Easily Hydrolyzable Compounds: High-Yield Preparation of 2-Pyrrolecarbaldimines and their CVD/ALD-Relevant Cu(II) Derivatives in H2O Grushin, Vladimir?V.; Marshall, William?J. Advanced Synthesis & Catalysis, Vol. 346, Issue 12 https://doi.org/10.1002/adsc.200404181	journal	October 2004
Studies of metal chelates with the novel ligand 2,2,7-trimethyl-3,5-octanedione Wenzel, Thomas J.; Williams, Eric J.; Haltiwanger, R. Curtis Polyhedron, Vol. 4, Issue 3 https://doi.org/10.1016/S0277-5387(00)86994-6	journal	January 1985
Luminescent gold(I) macrocycles with diphosphine and 4,4′-bipyridyl ligands Brandys, Marie-Claude; Jennings, Michael C.; Puddephatt, Richard J. Journal of the Chemical Society, Dalton Transactions, Issue 24 https://doi.org/10.1039/b005251p	journal	January 2000
Atomic Layer Epitaxy of Copper Mårtensson, Per Journal of The Electrochemical Society, Vol. 145, Issue 8 https://doi.org/10.1149/1.1838738	journal	January 1998
Crystal and molecular structures of two silver(I) amidinates, including an unexpected co-crystal with a lithium amidinate Wang, Sida; Harmgarth, Nicole; Liebing, Phil Acta Crystallographica Section E Crystallographic Communications, Vol. 72, Issue 12 https://doi.org/10.1107/S2056989016017680	journal	November 2016
Synthese und Kristallstruktur von tetramerem N,N'-Diphenylformamidinato-gold(I), [Au(PhNCH NPh)]4/Synthesis and Structure of Tetrameric N,N'-Diphenylformamidinato Gold(I), [Au(PhNCHNPh)]4 Hartmann, Edmund; Strähle, Joachim Zeitschrift für Naturforschung B, Vol. 44, Issue 1 https://doi.org/10.1515/znb-1989-0103	journal	January 1989
A brief review of atomic layer deposition: from fundamentals to applications Johnson, Richard W.; Hultqvist, Adam; Bent, Stacey F. Materials Today, Vol. 17, Issue 5 https://doi.org/10.1016/j.mattod.2014.04.026	journal	June 2014
Preventing thermolysis: precursor design for volatile copper compounds Coyle, Jason P.; Kurek, Agnieszka; Pallister, Peter J. Chemical Communications, Vol. 48, Issue 84 https://doi.org/10.1039/c2cc35415b	journal	January 2012
Synthesis and Structural Characterization of a Series of Group 11 2,2-Dialkyl-1,3-dicyclohexylguanidinate Complexes Adas, Sonya K.; Ocana, Jesus A.; Bunge, Scott D. Australian Journal of Chemistry, Vol. 67, Issue 7 https://doi.org/10.1071/CH14134	journal	January 2014
MOCVD of Silver Thin Films from the (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato)-silver[bis(trimethylsilyl)acetylene] Complex Chi, K. -M.; Lu, Y. -H. Chemical Vapor Deposition, Vol. 7, Issue 3 https://doi.org/10.1002/1521-3862(200105)7:3<117::AID-CVDE117>3.0.CO;2-7	journal	May 2001
Atomic Layer Deposition of Noble Metals and Their Oxides Hämäläinen, Jani; Ritala, Mikko; Leskelä, Markku Chemistry of Materials, Vol. 26, Issue 1 https://doi.org/10.1021/cm402221y	journal	September 2013
Thermally Robust Gold and Silver Iminopyrrolidinates for Chemical Vapor Deposition of Metal Films Coyle, Jason P.; Gordon, Peter G.; Wells, Adam P. Chemistry of Materials, Vol. 25, Issue 22 https://doi.org/10.1021/cm402658c	journal	November 2013
Experimental and theoretical studies of the copper(I) and silver(I) dinuclear N,N'-di-p-tolylformamidinato complexes Cotton, F. Albert.; Feng, Xuejun.; Matusz, Marek. Journal of the American Chemical Society, Vol. 110, Issue 21 https://doi.org/10.1021/ja00229a021	journal	October 1988

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