skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides

Abstract

The passive tuning of the resonant coupling wavelength in a SiN x vertical microring coupler (VμRC) monolithically integrated on a ridge waveguide by engineering the structural parameters of the VμRCs is experimentally demonstrated and theoretically verified. Multi-channel photonic coupling is achieved by integrating two different VμRCs on a single ridge waveguide. This work represents here a critical step to 3D photonic integration using VμRCs.

Authors:
 [1];  [1];  [1];  [1]; ORCiD logo [1]
  1. Univ. of Illinois, Urbana, IL (United States). Dept. of Electrical and Computer Engineering. Micro and Nanotechnology Lab.
Publication Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); National Science Foundation (NSF); Cisco Systems, Inc. (United States)
OSTI Identifier:
1510944
Alternate Identifier(s):
OSTI ID: 1416643
Grant/Contract Number:  
FG02-07ER46471; ECCS-1055941; CG-624009
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 112; Journal Issue: 2; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; semiconductors; finite-element analysis; waveguides; metal oxides; chemical compounds and components; electric currents; chemical elements; general topology; electrooptical devices; electrical properties and parameters

Citation Formats

Yu, Xin, Goddard, Lynford L., Zhu, Jinlong, Li, Xiuling, and Chen, Xiaogang. Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides. United States: N. p., 2018. Web. doi:10.1063/1.5017707.
Yu, Xin, Goddard, Lynford L., Zhu, Jinlong, Li, Xiuling, & Chen, Xiaogang. Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides. United States. doi:10.1063/1.5017707.
Yu, Xin, Goddard, Lynford L., Zhu, Jinlong, Li, Xiuling, and Chen, Xiaogang. Thu . "Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides". United States. doi:10.1063/1.5017707. https://www.osti.gov/servlets/purl/1510944.
@article{osti_1510944,
title = {Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides},
author = {Yu, Xin and Goddard, Lynford L. and Zhu, Jinlong and Li, Xiuling and Chen, Xiaogang},
abstractNote = {The passive tuning of the resonant coupling wavelength in a SiNx vertical microring coupler (VμRC) monolithically integrated on a ridge waveguide by engineering the structural parameters of the VμRCs is experimentally demonstrated and theoretically verified. Multi-channel photonic coupling is achieved by integrating two different VμRCs on a single ridge waveguide. This work represents here a critical step to 3D photonic integration using VμRCs.},
doi = {10.1063/1.5017707},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 2,
volume = 112,
place = {United States},
year = {2018},
month = {1}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 4 works
Citation information provided by
Web of Science

Figures / Tables:

FIG. 1 FIG. 1: Optical microscopy image of two VμRCs with different effective diameters monolithically integrated on a 2 μm wide ridge waveguide, before (a) and after (b) rolling up. Both VμRCs have the same inner diameter, but the left one has 4.52 coiled turns while the right one has 5.77 turns.more » (c) and (d) show a 4.52 coiled-turn microring before and after rolling up. Axial confinement is provided by a 2 μm wide, 7 nm thick a-Si strip directly above the ridge waveguide. Optical lithography is used for accurate alignment.« less

Save / Share:

Works referenced in this record:

Vertically aligned rolled-up SiO 2 optical microcavities in add-drop configuration
journal, June 2013

  • Böttner, Stefan; Li, Shilong; Jorgensen, Matthew R.
  • Applied Physics Letters, Vol. 102, Issue 25
  • DOI: 10.1063/1.4812661

Thermally controlled coupling of a rolled-up microtube integrated with a waveguide on a silicon electronic-photonic integrated circuit
journal, January 2014

  • Zhong, Qiuhang; Tian, Zhaobing; Veerasubramanian, Venkat
  • Optics Letters, Vol. 39, Issue 9
  • DOI: 10.1364/OL.39.002699

Optical properties of rolled-up tubular microcavities from shaped nanomembranes
journal, April 2009

  • Kiravittaya, S.; Bolaños Quiñones, V. A.; Benyoucef, M.
  • Applied Physics Letters, Vol. 94, Issue 14, Article No. 141901
  • DOI: 10.1063/1.3111813

Enhanced axial confinement in a monolithically integrated self-rolled-up SiNx vertical microring photonic coupler
journal, September 2016

  • Yu, Xin; Goddard, Lynford L.; Li, Xiuling
  • Applied Physics Letters, Vol. 109, Issue 11
  • DOI: 10.1063/1.4962901

Optical resonators with whispering-gallery modes-part I: basics
journal, January 2006

  • Matsko, A. B.; Ilchenko, V. S.
  • IEEE Journal of Selected Topics in Quantum Electronics, Vol. 12, Issue 1
  • DOI: 10.1109/JSTQE.2005.862952

Strain induced semiconductor nanotubes from formation process to device applications
journal, September 2008


Optical microcavities with tubular geometry: properties and applications: Tubular Optical Microcavity
journal, June 2013

  • Wang, Jiao; Zhan, Tianrong; Huang, Gaoshan
  • Laser & Photonics Reviews, Vol. 8, Issue 4
  • DOI: 10.1002/lpor.201300040

Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration
journal, July 2015

  • Yu, Xin; Arbabi, Ehsan; Goddard, Lynford L.
  • Applied Physics Letters, Vol. 107, Issue 3
  • DOI: 10.1063/1.4927243

Optical Modes in Semiconductor Microtube Ring Resonators
journal, February 2006


Light confinement and mode splitting in rolled-up semiconductor microtube bottle resonators
journal, April 2012


Vertical optical ring resonators fully integrated with nanophotonic waveguides on silicon-on-insulator substrates
journal, January 2015

  • Madani, Abbas; Kleinert, Moritz; Stolarek, David
  • Optics Letters, Vol. 40, Issue 16
  • DOI: 10.1364/OL.40.003826

Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties
journal, January 2011

  • Li, Xiuling
  • Advances in Optics and Photonics, Vol. 3, Issue 4, p. 366-387
  • DOI: 10.1364/AOP.3.000366

    Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.