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Title: CMOS compatible processing for phosphorous delta-layer nanoscale electronics.

Abstract

Abstract not provided.

Authors:
; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1501971
Report Number(s):
SAND2018-2597C
661327
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the APS March Meeting held March 5-9, 2018 in Los Angeles, CA.
Country of Publication:
United States
Language:
English

Citation Formats

Campbell, DeAnna Marie, Marshall, Michael Thomas, Maurer, Leon, Koepke, Justin, Lu, Tzu-Ming, Ward, Daniel Robert, and Misra, Shashank. CMOS compatible processing for phosphorous delta-layer nanoscale electronics.. United States: N. p., 2018. Web.
Campbell, DeAnna Marie, Marshall, Michael Thomas, Maurer, Leon, Koepke, Justin, Lu, Tzu-Ming, Ward, Daniel Robert, & Misra, Shashank. CMOS compatible processing for phosphorous delta-layer nanoscale electronics.. United States.
Campbell, DeAnna Marie, Marshall, Michael Thomas, Maurer, Leon, Koepke, Justin, Lu, Tzu-Ming, Ward, Daniel Robert, and Misra, Shashank. Thu . "CMOS compatible processing for phosphorous delta-layer nanoscale electronics.". United States. https://www.osti.gov/servlets/purl/1501971.
@article{osti_1501971,
title = {CMOS compatible processing for phosphorous delta-layer nanoscale electronics.},
author = {Campbell, DeAnna Marie and Marshall, Michael Thomas and Maurer, Leon and Koepke, Justin and Lu, Tzu-Ming and Ward, Daniel Robert and Misra, Shashank},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {3}
}

Conference:
Other availability
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