Introduction to Surface Science Spectra Data on Electron and X-ray Damage: Sample Degradation during XPS and AES Measurements
Journal Article
·
· Surface Science Spectra
The types of damage to sample surfaces that can occur during X-ray or electron irradiation used during Auger electron spectroscopy (AES) and X-ray Photoelectron Spectroscopy (XPS) are summarized. The material and instrumental dependence of the rate and nature of damage formation or sample degradation are highlighted. Particular note is made of an enhanced susceptibility of thin films to damage. A simple method to enable comparison of published damage rates to what may be observed in a specific system is described and discussed in relation to data included in this journal volume. Strategies for detecting and minimizing damage are presented.
- Research Organization:
- Pacific Northwest National Lab., Richland, WA (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC05-76RL01830
- OSTI ID:
- 15016100
- Report Number(s):
- PNNL-SA-41724; SSSPEN; KP1301030; TRN: US0501850
- Journal Information:
- Surface Science Spectra, Vol. 10, Issue 1-4; Other Information: PBD: 23 Feb 2003; ISSN 1055-5269
- Country of Publication:
- United States
- Language:
- English
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