ACTINIC MASK INSPECTION AT THE ALS: RISK REDUCTION ACTIVITIES FOR 2003
This document reports on risk reduction activities performed at the VNL during CY2003 as a part of the Lith-343 actinic inspection project funded by International SEMATECH. The risk reduction activities described in this document comprise deliverable items 3.1.3, 3.1.4, 3.1.5 and 3.1.6 of Amendment 6 to the VNL EUV mask blank technology transfer contract.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 15013831
- Report Number(s):
- UCRL-SR-201686; TRN: US200803%%858
- Country of Publication:
- United States
- Language:
- English
Similar Records
Actinic Mask Inspection at the ALS Initial Design Review
Actinic EUV mask inspection beyond 0.25 NA
Aerial Image Microscopes for the Inspection of Defects in EUV Masks
Technical Report
·
Wed Mar 05 00:00:00 EST 2003
·
OSTI ID:15013831
+14 more
Actinic EUV mask inspection beyond 0.25 NA
Conference
·
Wed Aug 06 00:00:00 EDT 2008
·
OSTI ID:15013831
+4 more
Aerial Image Microscopes for the Inspection of Defects in EUV Masks
Conference
·
Tue Oct 22 00:00:00 EDT 2002
·
OSTI ID:15013831
+4 more