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Title: Industrial Applications of Low Temperature Plasmas

Abstract

The use of low temperature plasmas in industry is illustrated by the discussion of four applications, to lighting, displays, semiconductor manufacturing and pollution control. The type of plasma required for each application is described and typical materials are identified. The need to understand radical formation, ionization and metastable excitation within the discharge and the importance of surface reactions are stressed.

Authors:
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
15013263
Report Number(s):
UCRL-JC-143047
TRN: US0600885
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Conference: Display Search Conference, Austin, TX, Mar 20 - Mar 22, 2001
Country of Publication:
United States
Language:
English
Subject:
54 ENVIRONMENTAL SCIENCES; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; EXCITATION; IONIZATION; MANUFACTURING; PLASMA; POLLUTION CONTROL; RADICALS

Citation Formats

Bardsley, J N. Industrial Applications of Low Temperature Plasmas. United States: N. p., 2001. Web. doi:10.1063/1.56165.
Bardsley, J N. Industrial Applications of Low Temperature Plasmas. United States. doi:10.1063/1.56165.
Bardsley, J N. Thu . "Industrial Applications of Low Temperature Plasmas". United States. doi:10.1063/1.56165. https://www.osti.gov/servlets/purl/15013263.
@article{osti_15013263,
title = {Industrial Applications of Low Temperature Plasmas},
author = {Bardsley, J N},
abstractNote = {The use of low temperature plasmas in industry is illustrated by the discussion of four applications, to lighting, displays, semiconductor manufacturing and pollution control. The type of plasma required for each application is described and typical materials are identified. The need to understand radical formation, ionization and metastable excitation within the discharge and the importance of surface reactions are stressed.},
doi = {10.1063/1.56165},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {3}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

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