PHASE TRANSFORMATION OF THIN SPUTTER-DEPOSITED TUNGSTEN FILMS AT ROOM TEMPERATURE
Journal Article
·
· Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
No abstract prepared.
- Research Organization:
- Brookhaven National Laboratory, National Synchrotron Light Source (US)
- Sponsoring Organization:
- DOE/OFFICE OF SCIENCE (US)
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 15008311
- Report Number(s):
- BNL-72880-2004-JA; TRN: US200426%%387
- Journal Information:
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Vol. 20, Issue 5; Other Information: PBD: 1 Jan 2002
- Country of Publication:
- United States
- Language:
- English
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