Laterally graded multilayers and their applications.
Journal Article
·
· Journal of Vacuum Science and Technology, A
No abstract prepared.
- Research Organization:
- Advanced Photon Source, Argonne National Lab., IL (US); Copenhagen Univ.; IIT (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31-109-ENG-38
- OSTI ID:
- 15002536
- Journal Information:
- Journal of Vacuum Science and Technology, A, Vol. 19, Issue 4; Conference: AVS 47th International Symposium, Boston, MA (US), 10/02/2000--10/06/2000; Other Information: PBD: 2001; Related Information: Jul./Aug. 2001; ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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