Sputtered Coatings for Microfluidic Applications

Journal Article · Wed Dec 01 00:00:00 EST 1999 · Journal of Vacuum Science and Technology A--Vacuum, Surfaces and Films

OSTI ID:15001344

Matson, Dean W ^[1]; Martin, Peter M ^[1]; Bennett, Wendy D ^[1]; Johnston, John W ^[1]; Stewart, Donald C ^[1]; Bonham, Charles C ^[1]

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1. BATTELLE (PACIFIC NW LAB)

Magnetron sputter-deposited features and coatings incorporated where other methods for producing these features have been deemed unacceptable. Applications include sensors, heaters, temperature probes, electrical leads, etc., and small features, such as electrodes, heaters on microfluidic chips. Use of the coating technology, its application in the fabrication of these devices and the technical issues, such as adhesion and chemical resistance are addressed.

• Research Organization: Pacific Northwest National Lab., Richland, WA (US)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC06-76RL01830
• OSTI ID: 15001344
• Report Number(s): PNNL-SA-32348; TRN: US200404%%33
• Journal Information: Journal of Vacuum Science and Technology A--Vacuum, Surfaces and Films, Vol. 18, Issue 4, pt 2; Other Information: PBD: 1 Dec 1999
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
36 MATERIALS SCIENCE
SPUTTERING
ADHESION
COATINGS
FABRICATION
USES
MICROELECTRONIC CIRCUITS
CORROSION RESISTANCE
SPUTTER-DEPOSITED
MICROFLUIDIC