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Title: Performance studies of atomic layer deposited microchannel plate electron multipliers

Journal Article · · Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment
 [1];  [1];  [2];  [2];  [2];  [3];  [3]
  1. Univ. of California, Berkeley, CA (United States)
  2. Incom, Inc., Charlton, MA (United States)
  3. Argonne National Lab. (ANL), Argonne, IL (United States)
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Microchannel plate (MCP) photon counting, event timing, imaging detectors have found wide use in astronomical, remote sensing, and biological imaging applications. Novel MCP technology using borosilicate glass microcapillary array substrates functionalized by the application of resistive and secondary emissive layers using atomic layer deposition (ALD) techniques has the potential to outperform traditional MCP technology. Using ALD techniques to functionalize the MCPs allow customization of parameters like gain and resistance independently from the glass substrate. Borosilicate substrates have many advantages over traditional micro-capillary arrays, including low radioactive content, higher open area ratios, low outgassing, and high operational stability. These ALD MCPs can be manufactured in large areas (400 cm2) providing a unique solution for many timing/imaging applications. ALD MCPs can withstand the processing temperatures required for high temperature deposition of III-V materials, such as Gallium Nitride, for UV photocathodes with high quantum efficiencies (QE) in the Near-UV (similar to 100-380 nm). We present the effects of different ALD configurations on the gain (magnitude and uniformity), resistance, imaging, background and detection efficiency, and how these parameters change during lifetime testing. Here, we also present the QE of ALD MCPs and various QE enhancement techniques.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Organization:
National Aeronautics and Space Administration (NASA); USDOE Office of Science (SC)
Grant/Contract Number:
AC02-06CH11357
OSTI ID:
1500110
Journal Information:
Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 912, Issue C; ISSN 0168-9002
Publisher:
ElsevierCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 7 works
Citation information provided by
Web of Science

References (7)

The FUV detector for the cosmic origins spectrograph on the Hubble Space Telescope
  • Vallerga, J.; Zaninovich, J.; Welsh, B.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 477, Issue 1-3 https://doi.org/10.1016/S0168-9002(01)01921-0
journal January 2002
Optical detection of rapidly moving objects in space journal January 2005
New photon-counting detectors for single-molecule fluorescence spectroscopy and imaging conference May 2011
Atomic Layer Deposition: An Overview journal January 2010
Microchannel plate fabrication using glass capillary arrays with Atomic Layer Deposition films for resistance and gain journal August 2016
Microchannel Plate Imaging Detectors for High Dynamic Range Applications journal July 2017
High dynamic range photon counting imagers using nano-engineered microchannel plates conference October 2015

Cited By (2)

MCP detector development for UV space missions journal March 2018
MCP detector development for UV space missions text January 2018

Figures / Tables (7)

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Fig. 5.(p. 2)figure Fig. 5.
Fig. 6.(p. 3)figure Fig. 6.
Fig. 7.(p. 3)figure Fig. 7.

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46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
atomic layer deposition
microchannel plate