Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
The International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN), commonly known as “three beams,” is the premier conference for the early dissemination of high-impact, high-quality information on the science and technology of nano-patterning and associated electron, ion, or photon-beam technologies (the three beams). The conference consistently brings together over 400 engineers and scientists in industry, academia, and government from all over the world to discuss interdisciplinary issues at the forefront of these areas. The attendees of EIPBN have organically grown into a community of researchers that span the globe. Our membership ranges from young students at the beginning of their career to senior members who have been attending for more than 60 years. The 62nd EIPBN was held in Wyndham Rio Mar Beach Resort and Spa, Puerto Rico from May 29 to Jun 1st, 2018.
- Research Organization:
- New Jersey Institute of Technology, Newark, NJ (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division
- DOE Contract Number:
- SC0018742
- OSTI ID:
- 1492434
- Report Number(s):
- DOE-NJIT-0018742-1
- Journal Information:
- Journal of Vacuum Science & Technology B, Vol. 36, Issue 6; Conference: 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication May 29–June 1, 2018 Rio Mar Beach Resort & Spa. Puerto Rico
- Country of Publication:
- United States
- Language:
- English
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