Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Zöhrer, Siegfried; Anders, André; Franz, Robert

doi:10.1088/1361-6595/aabdc7

Title: Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum

Journal Article · Tue May 01 00:00:00 EDT 2018 · Plasma Sources Science and Technology

DOI:https://doi.org/10.1088/1361-6595/aabdc7· OSTI ID:1437860

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Cathodic arcs have been utilized in various applications including the deposition of thin films and coatings, ion implantation, and high current switching. Despite substantial progress in recent decades, the physical mechanisms responsible for the observed plasma properties are still a matter of dispute, particularly for multi-element cathodes, which can play an essential role in applications. The analysis of plasma properties is complicated by the generally occurring neutral background of metal atoms, which perturbs initial ion properties. By using a time-resolved method in combination with pulsed arcs and a comprehensive Nb–Al cathode model system, we investigate the influence of cathode composition on the plasma, while making the influence of neutrals visible for the observed time frame. The results visualize ion detections of 600 μs plasma pulses, extracted 0.27 m from the cathode, resolved in mass-per-charge, energy-per-charge and time. Ion properties are found to be strongly dependent on the cathode material in a way that cannot be deduced by simple linear extrapolation. Subsequently, current hypotheses in cathodic arc physics applying to multi-element cathodes, like the so-called 'velocity rule' or the 'cohesive energy rule', are tested for early and late stages of the pulse. Apart from their fundamental character, the findings could be useful in optimizing or designing plasma properties for applications, by actively utilizing effects on ion distributions caused by composite cathode materials and charge exchange with neutrals.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1437860

Alternate ID(s):: OSTI ID: 1492318

Journal Information:: Plasma Sources Science and Technology, Journal Name: Plasma Sources Science and Technology Vol. 27 Journal Issue: 5; ISSN 1361-6595

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 7 works

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