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Title: LaB6 nanostructures - wet vs dry etch.

Abstract

Abstract not provided.

Authors:
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1491599
Report Number(s):
SAND2019-0480R
671595
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English

Citation Formats

Ohta, Taisuke. LaB6 nanostructures - wet vs dry etch.. United States: N. p., 2019. Web. doi:10.2172/1491599.
Ohta, Taisuke. LaB6 nanostructures - wet vs dry etch.. United States. doi:10.2172/1491599.
Ohta, Taisuke. Tue . "LaB6 nanostructures - wet vs dry etch.". United States. doi:10.2172/1491599. https://www.osti.gov/servlets/purl/1491599.
@article{osti_1491599,
title = {LaB6 nanostructures - wet vs dry etch.},
author = {Ohta, Taisuke},
abstractNote = {Abstract not provided.},
doi = {10.2172/1491599},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {1}
}