Multi-purposed Ar gas cluster ion beam processing for graphene engineering

Kim, Songkil; Ievlev, Anton; Jakowski, Jacek; Vlassiouk, Ivan V.; Sang, Xiahan; Brown, Chance C.; Dyck, Ondrej E.; Unocic, Raymond R.; Kalinin, Sergei V.; Belianinov, Alex; Sumpter, Bobby; Jesse, Stephen; Ovchinnikova, Olga S.

doi:10.1016/j.carbon.2018.01.098

Title: Multi-purposed Ar gas cluster ion beam processing for graphene engineering

Journal Article · Sat Feb 03 00:00:00 EST 2018 · Carbon

DOI:https://doi.org/10.1016/j.carbon.2018.01.098· OSTI ID:1491317

^[1];

^[2];

^[3];

^[4]; Brown, Chance C. ^[5];

^[1];

^[4];

^[1];

^[2];

^[1];

^[1]

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Inst. for Functional Imaging of Materials
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Computational Sciences and Engineering Division
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Energy & Transportation Science Division
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences; Univ. of Tennessee, Knoxville, TN (United States). Bredesen Center

Graphene, with unique mechanical and electrical properties, offers diverse application opportunities from beyond Moore’s nano-electronics to water filtration. However, accomplishing these relies on cleaning and processing large areas of supported and suspended graphene sheets. Here in this paper, we demonstrate the use of an Ar cluster ion beam as a versatile tool for graphene cleaning, defect engineering, and nanopore fabrication. In-situ and ex-situ characterization techniques were utilized in combination with first principles molecular dynamics, to highlight the differences in processing of the supported and suspended graphene samples. In this work, we monitor interaction of the Ar cluster ion beam with graphene as a function of ion dose with in-situ secondary ion mass spectrometry (SIMS), as well as ex-situ Raman spectroscopy measurements. Scanning transmission electron microscopy (STEM) results confirm that the Ar cluster ion beam can form nanopores in the suspended graphene; while the basal plane of graphene remains intact maintaining the lattice structure. Finally, Scanning Electron Microscopy (SEM) image analysis of the irradiated samples allows quantitative tracking of pore areas and their distribution as a function of ion dose. This study highlights the flexibility of the Ar cluster ion beam in 2D material processing, and offers insights into Ar beam interaction with graphene.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Laboratory Directed Research and Development Program (LDRD) Program

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1491317

Journal Information:: Carbon, Vol. 131, Issue C; ISSN 0008-6223

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 13 works

Citation information provided by
Web of Science

References (48)

Graphene: Status and Prospects Geim, A. K. Science, Vol. 324, Issue 5934, p. 1530-1534 https://doi.org/10.1126/science.1158877	journal	June 2009
A roadmap for graphene Novoselov, K. S.; Fal′ko, V. I.; Colombo, L. Nature, Vol. 490, Issue 7419 https://doi.org/10.1038/nature11458	journal	October 2012
Graphene opens up to DNA Siwy, Zuzanna S.; Davenport, Matthew Nature Nanotechnology, Vol. 5, Issue 10 https://doi.org/10.1038/nnano.2010.198	journal	October 2010
Graphene-based membranes: status and prospects Yoon, Hee Wook; Cho, Young Hoon; Park, Ho Bum Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 374, Issue 2060, Article No. 20150024 https://doi.org/10.1098/rsta.2015.0024	journal	December 2015
Water desalination using nanoporous single-layer graphene Surwade, Sumedh P.; Smirnov, Sergei N.; Vlassiouk, Ivan V. Nature Nanotechnology, Vol. 10, Issue 5 https://doi.org/10.1038/nnano.2015.37	journal	March 2015
Defect-Engineered Heat Transport in Graphene: A Route to High Efficient Thermal Rectification Zhao, Weiwei; Wang, Yanlei; Wu, Zhangting Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep11962	journal	July 2015
Colossal enhancement of spin–orbit coupling in weakly hydrogenated graphene Balakrishnan, Jayakumar; Kok Wai Koon, Gavin; Jaiswal, Manu Nature Physics, Vol. 9, Issue 5 https://doi.org/10.1038/nphys2576	journal	March 2013
Irradiation effects in carbon nanostructures Banhart, Florian Reports on Progress in Physics, Vol. 62, Issue 8 https://doi.org/10.1088/0034-4885/62/8/201	journal	July 1999
Precision cutting and patterning of graphene with helium ions Bell, D. C.; Lemme, M. C.; Stern, L. A. Nanotechnology, Vol. 20, Issue 45 https://doi.org/10.1088/0957-4484/20/45/455301	journal	October 2009
Plasma engineering of graphene Dey, A.; Chroneos, A.; Braithwaite, N. St. J. Applied Physics Reviews, Vol. 3, Issue 2 https://doi.org/10.1063/1.4947188	journal	June 2016
Maskless Lithography and in situ Visualization of Conductivity of Graphene using Helium Ion Microscopy Iberi, Vighter; Vlassiouk, Ivan; Zhang, X. -G. Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep11952	journal	July 2015
Using an energized oxygen micro-jet for improved graphene etching by focused electron beam Kim, Songkil; Henry, Mathias; Fedorov, Andrei G. Applied Physics Letters, Vol. 107, Issue 23 https://doi.org/10.1063/1.4937118	journal	December 2015
Controlling the Physicochemical State of Carbon on Graphene Using Focused Electron-Beam-Induced Deposition Kim, Songkil; Kulkarni, Dhaval D.; Davis, Richard ACS Nano, Vol. 8, Issue 7 https://doi.org/10.1021/nn5011073	journal	June 2014
Toward Two-Dimensional All-Carbon Heterostructures via Ion Beam Patterning of Single-Layer Graphene Kotakoski, Jani; Brand, Christian; Lilach, Yigal Nano Letters, Vol. 15, Issue 9 https://doi.org/10.1021/acs.nanolett.5b02063	journal	July 2015
Atom-by-atom nucleation and growth of graphene nanopores Russo, C. J.; Golovchenko, J. A. Proceedings of the National Academy of Sciences, Vol. 109, Issue 16, p. 5953-5957 https://doi.org/10.1073/pnas.1119827109	journal	April 2012
New insights into the structure and reduction of graphite oxide Gao, Wei; Alemany, Lawrence B.; Ci, Lijie Nature Chemistry, Vol. 1, Issue 5, p. 403-408 https://doi.org/10.1038/nchem.281	journal	July 2009
Molecular dynamics simulations of nanopore processing in a graphene sheet by using gas cluster ion beam Inui, Norio; Mochiji, Kozo; Moritani, Kousuke Applied Physics A, Vol. 98, Issue 4 https://doi.org/10.1007/s00339-009-5528-0	journal	December 2009
Removal of Organic Contamination from Graphene with a Controllable Mass-Selected Argon Gas Cluster Ion Beam Tyler, Bonnie J.; Brennan, Barry; Stec, Helena The Journal of Physical Chemistry C, Vol. 119, Issue 31 https://doi.org/10.1021/acs.jpcc.5b03144	journal	July 2015
Formation of nanopore in a suspended graphene sheet with argon cluster bombardment: A molecular dynamics simulation study Zabihi, Zabiholah; Araghi, Houshang Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 343 https://doi.org/10.1016/j.nimb.2014.11.022	journal	January 2015
Drilling Nanopores in Graphene with Clusters: A Molecular Dynamics Study Zhao, Shijun; Xue, Jianming; Liang, Li The Journal of Physical Chemistry C, Vol. 116, Issue 21 https://doi.org/10.1021/jp3023293	journal	May 2012
Gas Cluster Ion Beam Equipment and Applications for Surface Processing Toyoda, Noriaki; Yamada, Isao IEEE Transactions on Plasma Science, Vol. 36, Issue 4 https://doi.org/10.1109/TPS.2008.927266	journal	August 2008
Argon Cluster Ion Beams for Organic Depth Profiling: Results from a VAMAS Interlaboratory Study Shard, Alexander G.; Havelund, Rasmus; Seah, Martin P. Analytical Chemistry, Vol. 84, Issue 18 https://doi.org/10.1021/ac301567t	journal	September 2012
Atomistic-Scale Simulations of Defect Formation in Graphene under Noble Gas Ion Irradiation Yoon, Kichul; Rahnamoun, Ali; Swett, Jacob L. ACS Nano, Vol. 10, Issue 9 https://doi.org/10.1021/acsnano.6b03036	journal	August 2016
Graphene transport properties upon exposure to PMMA processing and heat treatments Gammelgaard, Lene; Caridad, José M.; Cagliani, Alberto 2D Materials, Vol. 1, Issue 3 https://doi.org/10.1088/2053-1583/1/3/035005	journal	November 2014
Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes Li, Xuesong; Zhu, Yanwu; Cai, Weiwei Nano Letters, Vol. 9, Issue 12 https://doi.org/10.1021/nl902623y	journal	December 2009
Nanometer size hole fabrication in 2d ultrathin films with cluster ion beams Insepov, Z.; Ainabayev, A.; Kirkpatrick, S. AIP Advances, Vol. 7, Issue 7 https://doi.org/10.1063/1.4996185	journal	July 2017
Large scale atmospheric pressure chemical vapor deposition of graphene Vlassiouk, Ivan; Fulvio, Pasquale; Meyer, Harry Carbon, Vol. 54 https://doi.org/10.1016/j.carbon.2012.11.003	journal	April 2013
Graphene Nucleation Density on Copper: Fundamental Role of Background Pressure Vlassiouk, Ivan; Smirnov, Sergei; Regmi, Murari The Journal of Physical Chemistry C, Vol. 117, Issue 37 https://doi.org/10.1021/jp4047648	journal	September 2013
Implementation and benchmark tests of the DFTB method and its application in the ONIOM method Zheng, Guishan; Lundberg, Marcus; Jakowski, Jacek International Journal of Quantum Chemistry, Vol. 109, Issue 9 https://doi.org/10.1002/qua.22002	journal	January 2009
Advances in molecular quantum chemistry contained in the Q-Chem 4 program package Shao, Yihan; Gan, Zhengting; Epifanovsky, Evgeny Molecular Physics, Vol. 113, Issue 2 https://doi.org/10.1080/00268976.2014.952696	journal	September 2014
NWChem: A comprehensive and scalable open-source solution for large scale molecular simulations Valiev, M.; Bylaska, E. J.; Govind, N. Computer Physics Communications, Vol. 181, Issue 9, p. 1477-1489 https://doi.org/10.1016/j.cpc.2010.04.018	journal	September 2010
A highly accurate interatomic potential for argon Aziz, Ronald A. The Journal of Chemical Physics, Vol. 99, Issue 6 https://doi.org/10.1063/1.466051	journal	September 1993
Secondary Ion Mass Spectrometry of Polymers: a ToF SIMS Study of Monodispersed PMMA Standards Leeson, Alistair M.; Alexander, Morgan R.; Short, Robert D. Surface and Interface Analysis, Vol. 25, Issue 4 https://doi.org/10.1002/(SICI)1096-9918(199704)25:4<261::AID-SIA233>3.0.CO;2-K	journal	April 1997
Evolution of the Raman spectra from single-, few-, and many-layer graphene with increasing disorder Martins Ferreira, E. H.; Moutinho, Marcus V. O.; Stavale, F. Physical Review B, Vol. 82, Issue 12 https://doi.org/10.1103/PhysRevB.82.125429	journal	September 2010
Doping of adsorbed graphene from defects and impurities in SiO $_{2}$ substrates Nistor, Razvan A.; Kuroda, Marcelo A.; Maarouf, Ahmed A. Physical Review B, Vol. 86, Issue 4 https://doi.org/10.1103/PhysRevB.86.041409	journal	July 2012
Quantifying Defects in Graphene via Raman Spectroscopy at Different Excitation Energies Cançado, L. G.; Jorio, A.; Ferreira, E. H. Martins Nano Letters, Vol. 11, Issue 8, p. 3190-3196 https://doi.org/10.1021/nl201432g	journal	July 2011
Probing the Nature of Defects in Graphene by Raman Spectroscopy Eckmann, Axel; Felten, Alexandre; Mishchenko, Artem Nano Letters, Vol. 12, Issue 8 https://doi.org/10.1021/nl300901a	journal	July 2012
Interpretation of Raman spectra of disordered and amorphous carbon Ferrari, A. C.; Robertson, J. Physical Review B, Vol. 61, Issue 20, p. 14095-14107 https://doi.org/10.1103/PhysRevB.61.14095	journal	May 2000
Raman characterization of defects and dopants in graphene Beams, Ryan; Gustavo Cançado, Luiz; Novotny, Lukas Journal of Physics: Condensed Matter, Vol. 27, Issue 8 https://doi.org/10.1088/0953-8984/27/8/083002	journal	January 2015
Monitoring dopants by Raman scattering in an electrochemically top-gated graphene transistor Das, A.; Pisana, S.; Chakraborty, B. Nature Nanotechnology, Vol. 3, Issue 4 https://doi.org/10.1038/nnano.2008.67	journal	March 2008
Effect of SiO ₂ substrate on the irradiation-assisted manipulation of supported graphene: a molecular dynamics study Zhao, Shijun; Xue, Jianming; Wang, Yugang Nanotechnology, Vol. 23, Issue 28 https://doi.org/10.1088/0957-4484/23/28/285703	journal	June 2012
Characterization of Ar[sub n]O[sup −] clusters from ab initio and diffusion Monte Carlo calculations Jakowski, Jacek; Chałasiński, Grzegorz; Gallegos, Joseph The Journal of Chemical Physics, Vol. 118, Issue 6 https://doi.org/10.1063/1.1531110	journal	January 2003
Tuning interfacial thermal conductance of graphene embedded in soft materials by vacancy defects Liu, Ying; Hu, Chongze; Huang, Jingsong The Journal of Chemical Physics, Vol. 142, Issue 24 https://doi.org/10.1063/1.4922775	journal	June 2015
Duality of the interfacial thermal conductance in graphene-based nanocomposites Liu, Ying; Huang, Jingsong; Yang, Bao Carbon, Vol. 75 https://doi.org/10.1016/j.carbon.2014.03.050	journal	August 2014
Modeling Charge Transfer in Fullerene Collisions via Real-Time Electron Dynamics Jakowski, Jacek; Irle, Stephan; Sumpter, Bobby G. The Journal of Physical Chemistry Letters, Vol. 3, Issue 11 https://doi.org/10.1021/jz3004377	journal	May 2012
Time-dependent quantum dynamical simulations of C ₂ condensation under extreme conditions Jakowski, Jacek; Irle, Stephan; Morokuma, Keiji Phys. Chem. Chem. Phys., Vol. 14, Issue 18 https://doi.org/10.1039/C1CP22035G	journal	January 2012
Liouville–von Neumann molecular dynamics Jakowski, Jacek; Morokuma, Keiji The Journal of Chemical Physics, Vol. 130, Issue 22 https://doi.org/10.1063/1.3152120	journal	June 2009
Structural Defects in Graphene Banhart, Florian; Kotakoski, Jani; Krasheninnikov, Arkady V. ACS Nano, Vol. 5, Issue 1 https://doi.org/10.1021/nn102598m	journal	November 2010

Cited By (2)

Pulsed Laser-Assisted Helium Ion Nanomachining of Monolayer Graphene—Direct-Write Kirigami Patterns Zhang, Cheng; Dyck, Ondrej; Garfinkel, David A. Nanomaterials, Vol. 9, Issue 10 https://doi.org/10.3390/nano9101394	journal	September 2019
Emerging nanofabrication and quantum confinement techniques for 2D materials beyond graphene Stanford, Michael G.; Rack, Philip D.; Jariwala, Deep npj 2D Materials and Applications, Vol. 2, Issue 1 https://doi.org/10.1038/s41699-018-0065-3	journal	July 2018