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Title: Mechanisms Controlling the Phase and Dislocation Density in Epitaxial Silicon Films Grown from Silane below 800 °C

Authors:
; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
OSTI Identifier:
1488374
Report Number(s):
NREL/JA-520-48500
Journal ID: ISSN 0003-6951
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 96; Journal Issue: 20; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; silicon films; epitaxy; electron beam evaporation

Citation Formats

Teplin, Charles W., Alberi, Kirstin, Shub, Maxim, Beall, Carolyn, Martin, Ina T., Romero, Manuel J., Young, David L., Reedy, Robert C., Stradins, Paul, and Branz, Howard M. Mechanisms Controlling the Phase and Dislocation Density in Epitaxial Silicon Films Grown from Silane below 800 °C. United States: N. p., 2010. Web. doi:10.1063/1.3422474.
Teplin, Charles W., Alberi, Kirstin, Shub, Maxim, Beall, Carolyn, Martin, Ina T., Romero, Manuel J., Young, David L., Reedy, Robert C., Stradins, Paul, & Branz, Howard M. Mechanisms Controlling the Phase and Dislocation Density in Epitaxial Silicon Films Grown from Silane below 800 °C. United States. doi:10.1063/1.3422474.
Teplin, Charles W., Alberi, Kirstin, Shub, Maxim, Beall, Carolyn, Martin, Ina T., Romero, Manuel J., Young, David L., Reedy, Robert C., Stradins, Paul, and Branz, Howard M. Mon . "Mechanisms Controlling the Phase and Dislocation Density in Epitaxial Silicon Films Grown from Silane below 800 °C". United States. doi:10.1063/1.3422474.
@article{osti_1488374,
title = {Mechanisms Controlling the Phase and Dislocation Density in Epitaxial Silicon Films Grown from Silane below 800 °C},
author = {Teplin, Charles W. and Alberi, Kirstin and Shub, Maxim and Beall, Carolyn and Martin, Ina T. and Romero, Manuel J. and Young, David L. and Reedy, Robert C. and Stradins, Paul and Branz, Howard M.},
abstractNote = {},
doi = {10.1063/1.3422474},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 20,
volume = 96,
place = {United States},
year = {2010},
month = {5}
}

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