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Title: Selective Metal Oxide Atomic Layer Deposition: Toward Precision Few-Atom Clusters Synthesis

Authors:
; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science - Office of Basic Energy Sciences - Materials Sciences and Engineering Division
OSTI Identifier:
1477780
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Conference
Resource Relation:
Conference: 255th American Chemical Society National Meeting and Exposition, 03/18/18 - 03/22/18, New Orleans, LA, US
Country of Publication:
United States
Language:
English

Citation Formats

Cao, Duyen, Emery, Jonathan, Pellin, Michael, and Martinson, Alex. Selective Metal Oxide Atomic Layer Deposition: Toward Precision Few-Atom Clusters Synthesis. United States: N. p., 2018. Web.
Cao, Duyen, Emery, Jonathan, Pellin, Michael, & Martinson, Alex. Selective Metal Oxide Atomic Layer Deposition: Toward Precision Few-Atom Clusters Synthesis. United States.
Cao, Duyen, Emery, Jonathan, Pellin, Michael, and Martinson, Alex. Sun . "Selective Metal Oxide Atomic Layer Deposition: Toward Precision Few-Atom Clusters Synthesis". United States.
@article{osti_1477780,
title = {Selective Metal Oxide Atomic Layer Deposition: Toward Precision Few-Atom Clusters Synthesis},
author = {Cao, Duyen and Emery, Jonathan and Pellin, Michael and Martinson, Alex},
abstractNote = {},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {3}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

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