Power measurements and coupler optimization in inductive discharges
Abstract
The power absorbed by the plasma is one of the key parameters which defines processes in any plasma source. This power, however, can be very different from the power at the rf power source output or the coupler terminals, which has been used in many publications to characterize the plasma. This article describes how to find the power absorbed by the plasma and the power lost in the coupler and matcher network for inductively coupled plasmas. In addition, several practical coupler configurations to reduce the coupler coil loss and minimize the rf plasma potential are discussed. Here, we propose an effective and simple method to achieve that by the coupler coil splitting and insertion of the resonating capacitor in the middle of the coil. Our experimental data demonstrate this approach having superior coupler efficiency and substantially lower rf plasma potential.
- Authors:
-
- Univ. of Michigan, Ann Arbor, MI (United States). Electrical Engineering and Computer Science Dept.; USA and RF Plasma Consulting, Brookline, MA (United States)
- Plasma Sensors, Brookline, MA (United States)
- Publication Date:
- Research Org.:
- Univ. of Michigan, Ann Arbor, MI (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Fusion Energy Sciences (FES)
- OSTI Identifier:
- 1474346
- Alternate Identifier(s):
- OSTI ID: 1375662
- Grant/Contract Number:
- SC0001939
- Resource Type:
- Journal Article: Accepted Manuscript
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Volume: 88; Journal Issue: 8; Journal ID: ISSN 0034-6748
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Citation Formats
Godyak, V. A., and Alexandrovich, B. M. Power measurements and coupler optimization in inductive discharges. United States: N. p., 2017.
Web. doi:10.1063/1.4995810.
Godyak, V. A., & Alexandrovich, B. M. Power measurements and coupler optimization in inductive discharges. United States. https://doi.org/10.1063/1.4995810
Godyak, V. A., and Alexandrovich, B. M. 2017.
"Power measurements and coupler optimization in inductive discharges". United States. https://doi.org/10.1063/1.4995810. https://www.osti.gov/servlets/purl/1474346.
@article{osti_1474346,
title = {Power measurements and coupler optimization in inductive discharges},
author = {Godyak, V. A. and Alexandrovich, B. M.},
abstractNote = {The power absorbed by the plasma is one of the key parameters which defines processes in any plasma source. This power, however, can be very different from the power at the rf power source output or the coupler terminals, which has been used in many publications to characterize the plasma. This article describes how to find the power absorbed by the plasma and the power lost in the coupler and matcher network for inductively coupled plasmas. In addition, several practical coupler configurations to reduce the coupler coil loss and minimize the rf plasma potential are discussed. Here, we propose an effective and simple method to achieve that by the coupler coil splitting and insertion of the resonating capacitor in the middle of the coil. Our experimental data demonstrate this approach having superior coupler efficiency and substantially lower rf plasma potential.},
doi = {10.1063/1.4995810},
url = {https://www.osti.gov/biblio/1474346},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 8,
volume = 88,
place = {United States},
year = {Tue Aug 01 00:00:00 EDT 2017},
month = {Tue Aug 01 00:00:00 EDT 2017}
}
Web of Science
Works referenced in this record:
Resonance-Sustained Radio Frequency Discharges
journal, April 1969
- Taillet, J.
- American Journal of Physics, Vol. 37, Issue 4
Electrical and plasma parameters of ICP with high coupling efficiency
journal, February 2011
- Godyak, V. A.
- Plasma Sources Science and Technology, Vol. 20, Issue 2
Radio frequency matching for helicon plasma sources
journal, July 1996
- Rayner, J. P.; Cheetham, A. D.; French, G. N.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 14, Issue 4
Reduced electron temperature in a magnetized inductively-coupled plasma with internal coil
journal, October 2013
- Arancibia Monreal, J.; Chabert, P.; Godyak, V.
- Physics of Plasmas, Vol. 20, Issue 10
Dynamic plasma behaviour excited by m=+or-1 helicon wave
journal, September 1995
- Shinohara, S.; Miyauchi, Y.; Kawai, Y.
- Plasma Physics and Controlled Fusion, Vol. 37, Issue 9
Plasma and electrical characteristics of inductive discharge in a magnetic field
journal, July 2004
- Godyak, V. A.; Alexandrovich, B. M.
- Physics of Plasmas, Vol. 11, Issue 7
Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?
journal, May 2011
- Godyak, V. A.; Demidov, V. I.
- Journal of Physics D: Applied Physics, Vol. 44, Issue 23
Experimental setup and electrical characteristics of an inductively coupled plasma
journal, January 1999
- Godyak, V. A.; Piejak, R. B.; Alexandrovich, B. M.
- Journal of Applied Physics, Vol. 85, Issue 2
A simple analysis of an inductive RF discharge
journal, August 1992
- Piejak, R. B.; Godyak, V. A.; Alexandrovich, B. M.
- Plasma Sources Science and Technology, Vol. 1, Issue 3
Ferromagnetic enhanced inductive plasma sources
journal, June 2013
- Godyak, Valery
- Journal of Physics D: Applied Physics, Vol. 46, Issue 28
Miniaturization of inductively coupled plasma sources
journal, January 1999
- Yin, Y.; Messier, J.; Hopwood, J. A.
- IEEE Transactions on Plasma Science, Vol. 27, Issue 5
Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?
journal, June 2011
- Godyak, V. A.; Demidov, V. I.
- Journal of Physics D: Applied Physics, Vol. 44, Issue 26
Works referencing / citing this record:
Investigation of the power transfer efficiency in a radio-frequency driven negative hydrogen ion source
journal, May 2019
- Li, Hong; Gao, Fei; Wen, De-Qi
- Journal of Applied Physics, Vol. 125, Issue 17