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Title: Power measurements and coupler optimization in inductive discharges

Abstract

The power absorbed by the plasma is one of the key parameters which defines processes in any plasma source. This power, however, can be very different from the power at the rf power source output or the coupler terminals, which has been used in many publications to characterize the plasma. This article describes how to find the power absorbed by the plasma and the power lost in the coupler and matcher network for inductively coupled plasmas. In addition, several practical coupler configurations to reduce the coupler coil loss and minimize the rf plasma potential are discussed. Here, we propose an effective and simple method to achieve that by the coupler coil splitting and insertion of the resonating capacitor in the middle of the coil. Our experimental data demonstrate this approach having superior coupler efficiency and substantially lower rf plasma potential.

Authors:
ORCiD logo [1];  [2]
  1. Univ. of Michigan, Ann Arbor, MI (United States). Electrical Engineering and Computer Science Dept.; USA and RF Plasma Consulting, Brookline, MA (United States)
  2. Plasma Sensors, Brookline, MA (United States)
Publication Date:
Research Org.:
Univ. of Michigan, Ann Arbor, MI (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Fusion Energy Sciences (FES) (SC-24)
OSTI Identifier:
1474346
Alternate Identifier(s):
OSTI ID: 1375662
Grant/Contract Number:  
SC0001939
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 88; Journal Issue: 8; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Citation Formats

Godyak, V. A., and Alexandrovich, B. M.. Power measurements and coupler optimization in inductive discharges. United States: N. p., 2017. Web. doi:10.1063/1.4995810.
Godyak, V. A., & Alexandrovich, B. M.. Power measurements and coupler optimization in inductive discharges. United States. doi:10.1063/1.4995810.
Godyak, V. A., and Alexandrovich, B. M.. Tue . "Power measurements and coupler optimization in inductive discharges". United States. doi:10.1063/1.4995810. https://www.osti.gov/servlets/purl/1474346.
@article{osti_1474346,
title = {Power measurements and coupler optimization in inductive discharges},
author = {Godyak, V. A. and Alexandrovich, B. M.},
abstractNote = {The power absorbed by the plasma is one of the key parameters which defines processes in any plasma source. This power, however, can be very different from the power at the rf power source output or the coupler terminals, which has been used in many publications to characterize the plasma. This article describes how to find the power absorbed by the plasma and the power lost in the coupler and matcher network for inductively coupled plasmas. In addition, several practical coupler configurations to reduce the coupler coil loss and minimize the rf plasma potential are discussed. Here, we propose an effective and simple method to achieve that by the coupler coil splitting and insertion of the resonating capacitor in the middle of the coil. Our experimental data demonstrate this approach having superior coupler efficiency and substantially lower rf plasma potential.},
doi = {10.1063/1.4995810},
journal = {Review of Scientific Instruments},
number = 8,
volume = 88,
place = {United States},
year = {Tue Aug 01 00:00:00 EDT 2017},
month = {Tue Aug 01 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

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