Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography
- Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
Cantilever-free scanning probe lithography (SPL) employs soft elastomeric pen arrays to deliver material or energy to a surface to achieve a high-resolution, high-throughput, and low-cost nanopatterning. In particular, microscale elastomeric pyramid pen arrays are often adopted as the cantilever-free architecture owing to their distinct structural and mechanical properties. To better understand the mechanical behavior of the elastomeric pyramid pen array during the lithographic printing process, we numerically investigate the compression of an elastomeric pyramid array in a nonadhesive and frictionless contact with a rigid substrate. Simple scaling laws of the width of the contact surface with respect to the compression displacement and force are found and compared with previous models and experiments. By changing the interpyramid distance or the thickness of the base of the pyramid array, increasing deviations from the established scaling laws are observed and explained. Finally, we demonstrate that the unique morphology of a compressed pyramid primarily determines the unusual shape of the features fabricated by a specific cantilever-free SPL technique.
- Research Organization:
- Energy Frontier Research Centers (EFRC) (United States). Center for Bio-Inspired Energy Science (CBES)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- Grant/Contract Number:
- SC0000989
- OSTI ID:
- 1470549
- Journal Information:
- Journal of Polymer Science. Part B, Polymer Physics, Vol. 56, Issue 9; Related Information: CBES partners with Northwestern University (lead); Harvard University; New York University; Pennsylvania State University; University of Michigan; University of Pittsburgh; ISSN 0887-6266
- Publisher:
- WileyCopyright Statement
- Country of Publication:
- United States
- Language:
- English
Web of Science
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Related Subjects
77 NANOSCIENCE AND NANOTECHNOLOGY
36 MATERIALS SCIENCE
catalysis (homogeneous)
solar (photovoltaic)
bio-inspired
charge transport
mesostructured materials
materials and chemistry by design
synthesis (novel materials)
synthesis (self-assembly)
contact surface
deformation
finite element analysis
nanopatterning
pyramid array
scanning probe lithography