Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography

Liu, Shuangping; Olvera de la Cruz, Monica

doi:10.1002/polb.24585

Title: Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography

Journal Article · Tue Feb 06 00:00:00 EST 2018 · Journal of Polymer Science. Part B, Polymer Physics

DOI:https://doi.org/10.1002/polb.24585· OSTI ID:1470549

Liu, Shuangping ^[1];

^[1]

Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering

Cantilever-free scanning probe lithography (SPL) employs soft elastomeric pen arrays to deliver material or energy to a surface to achieve a high-resolution, high-throughput, and low-cost nanopatterning. In particular, microscale elastomeric pyramid pen arrays are often adopted as the cantilever-free architecture owing to their distinct structural and mechanical properties. To better understand the mechanical behavior of the elastomeric pyramid pen array during the lithographic printing process, we numerically investigate the compression of an elastomeric pyramid array in a nonadhesive and frictionless contact with a rigid substrate. Simple scaling laws of the width of the contact surface with respect to the compression displacement and force are found and compared with previous models and experiments. By changing the interpyramid distance or the thickness of the base of the pyramid array, increasing deviations from the established scaling laws are observed and explained. Finally, we demonstrate that the unique morphology of a compressed pyramid primarily determines the unusual shape of the features fabricated by a specific cantilever-free SPL technique.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Center for Bio-Inspired Energy Science (CBES)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0000989

OSTI ID:: 1470549

Journal Information:: Journal of Polymer Science. Part B, Polymer Physics, Vol. 56, Issue 9; Related Information: CBES partners with Northwestern University (lead); Harvard University; New York University; Pennsylvania State University; University of Michigan; University of Pittsburgh; ISSN 0887-6266

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 2 works

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Title: Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography

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