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Title: Atomic layer deposition for nanomaterial synthesis and functionalization in energy technology

Abstract

This review article summarizes the recent progress of atomic layer deposition (ALD) in energy technologies including rechargeable secondary batteries, fuel cells, photovoltaics, and optoelectronics.

Authors:
ORCiD logo [1];  [2]; ORCiD logo [3];  [4];  [5];  [6]
  1. Department of Mechanical Engineering; University of Arkansas; Fayetteville; USA
  2. School of Advanced Materials; Shenzhen Graduate School; Peking University; Shenzhen 518055; China
  3. Center for Green Innovation; School of Mathematics and Physics; University of Science and Technology Beijing; Beijing 100083; China
  4. ASELSAN Inc. – Microelectronics; Guidance and Electro-Optics Business Sector; Ankara 06750; Turkey
  5. Institut de Recherche et Développement sur l'Energie Photovoltaïque (IRDEP, UMR 7174, EDF-CNRS-Chimie ParisTech); 78401 Chatou; France; Institut Photovoltaïque d'Ile de France (IPVF); 92160 Antony
  6. Energy Systems Division; Argonne National Laboratory; Argonne; USA
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC) (United States). Center for Electrical Energy Storage (CEES)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1469973
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Journal Article
Journal Name:
Materials Horizons
Additional Journal Information:
Journal Volume: 4; Journal Issue: 2; Related Information: CEES partners with Argonne National Laboratory (lead); University of Illinois, Urbana-Champaign; Northwest University; Journal ID: ISSN 2051-6347
Publisher:
Royal Society of Chemistry
Country of Publication:
United States
Language:
English
Subject:
energy storage (including batteries and capacitors), charge transport, materials and chemistry by design, synthesis (novel materials)

Citation Formats

Meng, Xiangbo, Wang, Xinwei, Geng, Dongsheng, Ozgit-Akgun, Cagla, Schneider, Nathanaelle, and Elam, Jeffrey W. Atomic layer deposition for nanomaterial synthesis and functionalization in energy technology. United States: N. p., 2017. Web. doi:10.1039/c6mh00521g.
Meng, Xiangbo, Wang, Xinwei, Geng, Dongsheng, Ozgit-Akgun, Cagla, Schneider, Nathanaelle, & Elam, Jeffrey W. Atomic layer deposition for nanomaterial synthesis and functionalization in energy technology. United States. doi:10.1039/c6mh00521g.
Meng, Xiangbo, Wang, Xinwei, Geng, Dongsheng, Ozgit-Akgun, Cagla, Schneider, Nathanaelle, and Elam, Jeffrey W. Sun . "Atomic layer deposition for nanomaterial synthesis and functionalization in energy technology". United States. doi:10.1039/c6mh00521g.
@article{osti_1469973,
title = {Atomic layer deposition for nanomaterial synthesis and functionalization in energy technology},
author = {Meng, Xiangbo and Wang, Xinwei and Geng, Dongsheng and Ozgit-Akgun, Cagla and Schneider, Nathanaelle and Elam, Jeffrey W.},
abstractNote = {This review article summarizes the recent progress of atomic layer deposition (ALD) in energy technologies including rechargeable secondary batteries, fuel cells, photovoltaics, and optoelectronics.},
doi = {10.1039/c6mh00521g},
journal = {Materials Horizons},
issn = {2051-6347},
number = 2,
volume = 4,
place = {United States},
year = {2017},
month = {1}
}

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Ultra-thin alumina layer encapsulation of bulk heterojunction organic photovoltaics for enhanced device lifetime
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Atomic Layer Deposition of Gallium Sulfide Films Using Hexakis(dimethylamido)digallium and Hydrogen Sulfide
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Flexible Three-Dimensional SnO 2 Nanowire Arrays: Atomic Layer Deposition-Assisted Synthesis, Excellent Photodetectors, and Field Emitters
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Electrocatalysts by atomic layer deposition for fuel cell applications
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Low leakage of In0.83Ga0.17As photodiode with Al2O3/SiNx stacks
journal, July 2015


Atomic Layer Deposition of Platinum Nanoparticles on Carbon Nanotubes for Application in Proton‐Exchange Membrane Fuel Cells
journal, June 2009


Effect of Al 2 O 3 Recombination Barrier Layers Deposited by Atomic Layer Deposition in Solid-State CdS Quantum Dot-Sensitized Solar Cells
journal, March 2013

  • Roelofs, Katherine E.; Brennan, Thomas P.; Dominguez, Juan C.
  • The Journal of Physical Chemistry C, Vol. 117, Issue 11
  • DOI: 10.1021/jp311846r

Atomic layer epitaxy - a valuable tool for nanotechnology?
journal, January 1999


Band-Edge Engineered Hybrid Structures for Dye-Sensitized Solar Cells Based on SnO 2 Nanowires
journal, August 2008

  • Gubbala, Suresh; Chakrapani, Vidhya; Kumar, Vivekanand
  • Advanced Functional Materials, Vol. 18, Issue 16
  • DOI: 10.1002/adfm.200800099

Controllable fabrication of nanostructured materials for photoelectrochemical water splitting via atomic layer deposition
journal, January 2014

  • Wang, Tuo; Luo, Zhibin; Li, Chengcheng
  • Chem. Soc. Rev., Vol. 43, Issue 22
  • DOI: 10.1039/C3CS60370A

Vapor-Phase Atomic Layer Deposition of Co 9 S 8 and Its Application for Supercapacitors
journal, August 2015


Enhanced photoresponse of conformal TiO 2 /Ag nanorod array-based Schottky photodiodes fabricated via successive glancing angle and atomic layer deposition
journal, January 2015

  • Haider, Ali; Cansizoglu, Hilal; Cansizoglu, Mehmet Fatih
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 1
  • DOI: 10.1116/1.4898203

High efficiency n-ZnO/p-Si core–shell nanowire photodiode based on well-ordered Si nanowire array with smooth surface
journal, November 2014

  • Ko, Kyung Yong; Kang, Hyemin; Kim, Jungkil
  • Materials Science in Semiconductor Processing, Vol. 27
  • DOI: 10.1016/j.mssp.2014.07.012

Gate-Activated Photoresponse in a Graphene p–n Junction
journal, October 2011

  • Lemme, Max C.; Koppens, Frank H. L.; Falk, Abram L.
  • Nano Letters, Vol. 11, Issue 10
  • DOI: 10.1021/nl2019068

Atomic layer deposition of ZnS thin films based on diethyl zinc and hydrogen sulfide
journal, February 2002


Ga-Doped ZnO Grown by Atomic Layer Deposition and the Application to Blue Light-Emitting Diodes as a Current Spreading Layer
journal, January 2013

  • Bi, W. -L.; Ho, C. -L.; Wu, M. -C.
  • ECS Solid State Letters, Vol. 2, Issue 11
  • DOI: 10.1149/2.014311ssl

(Invited) Atomic Layer Deposition of Nanophase Materials for Electrical Energy Storage
journal, September 2015


Insulators with High Stability for Electroluminescent Devices
journal, June 2003

  • Lim, Jung Wook; Yun, Sun Jin
  • Japanese Journal of Applied Physics, Vol. 42, Issue Part 2, No. 6B
  • DOI: 10.1143/JJAP.42.L663

Atomic Layer Deposition of ZnO in Quantum Dot Thin Films
journal, January 2009

  • Pourret, Alexandre; Guyot-Sionnest, Philippe; Elam, Jeffrey W.
  • Advanced Materials, Vol. 21, Issue 2
  • DOI: 10.1002/adma.200801313

Influence of PEDOT:PSS on the effectiveness of barrier layers prepared by atomic layer deposition in organic light emitting diodes
journal, January 2015

  • Wegler, Barbara; Schmidt, Oliver; Hensel, Bernhard
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 1
  • DOI: 10.1116/1.4904500

Three-dimensional ZnO porous films for self-cleaning ultraviolet photodetectors
journal, January 2015

  • Cao, Yuanzhi; Deng, Sunbin; Hu, Qiyi
  • RSC Advances, Vol. 5, Issue 104
  • DOI: 10.1039/C5RA13372F

Nanomaterials for energy conversion and storage
journal, January 2013

  • Zhang, Qifeng; Uchaker, Evan; Candelaria, Stephanie L.
  • Chemical Society Reviews, Vol. 42, Issue 7
  • DOI: 10.1039/c3cs00009e

Control of Metal Nanocrystal Size Reveals Metal-Support Interface Role for Ceria Catalysts
journal, July 2013


Fabrication and Electrochemical Characterization of TiO 2 Three-Dimensional Nanonetwork Based on Peptide Assembly
journal, April 2009

  • Kim, Sung-Wook; Han, Tae Hee; Kim, Jongsoon
  • ACS Nano, Vol. 3, Issue 5
  • DOI: 10.1021/nn900062q

Aging of electroluminescent ZnS:Mn thin films deposited by atomic layer deposition processes
journal, December 2005

  • Ihanus, Jarkko; Lankinen, Mikko P.; Kemell, Marianna
  • Journal of Applied Physics, Vol. 98, Issue 11
  • DOI: 10.1063/1.2140892

Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications
journal, January 2016

  • Riha, Shannon C.; Koegel, Alexandra A.; Meng, Xiangbo
  • ACS Applied Materials & Interfaces, Vol. 8, Issue 4
  • DOI: 10.1021/acsami.5b11075

Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing
journal, January 2003

  • Kim, H.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6
  • DOI: 10.1116/1.1622676

Vapor-Phase Atomic Layer Deposition of Nickel Sulfide and Its Application for Efficient Oxygen-Evolution Electrocatalysis
journal, February 2016


Atomic Layer Deposition of CdS Quantum Dots for Solid-State Quantum Dot Sensitized Solar Cells
journal, October 2011

  • Brennan, Thomas P.; Ardalan, Pendar; Lee, Han-Bo-Ram
  • Advanced Energy Materials, Vol. 1, Issue 6
  • DOI: 10.1002/aenm.201100363

Highly selective spectral response with enhanced responsivity of n-ZnO/p-Si radial heterojunction nanowire photodiodes
journal, January 2011

  • Um, Han-Don; Moiz, Syed Abdul; Park, Kwang-Tae
  • Applied Physics Letters, Vol. 98, Issue 3
  • DOI: 10.1063/1.3543845

Encapsulation of Cu(InGa)Se2 solar cell with Al2O3 thin-film moisture barrier grown by atomic layer deposition
journal, December 2010


InGaN/GaN blue light emitting diodes using Al-doped ZnO grown by atomic layer deposition as a current spreading layer
journal, July 2011


Aluminum-doped zinc oxide formed by atomic layer deposition for use as anodes in organic light emitting diodes
journal, January 2013

  • Gong, Su Cheol; Choi, Yong-June; Kim, Hyuncheol
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 31, Issue 1
  • DOI: 10.1116/1.4738749

The Role of Insulating Oxides in Blocking the Charge Carrier Recombination in Dye-Sensitized Solar Cells
journal, October 2013

  • Chandiran, Aravind Kumar; Nazeeruddin, Mohammad K.; Grätzel, Michael
  • Advanced Functional Materials, Vol. 24, Issue 11
  • DOI: 10.1002/adfm.201302352

Tunable core-shell single-walled carbon nanotube-Cu2S networked nanocomposites as high-performance cathodes for lithium-ion batteries
journal, April 2015


Characteristics of GaN-based LEDs using Ga-doped or In-doped ZnO transparent conductive layers grown by atomic layer deposition
journal, February 2014


Electrochemical Energy Storage for Green Grid
journal, May 2011

  • Yang, Zhenguo; Zhang, Jianlu; Kintner-Meyer, Michael C. W.
  • Chemical Reviews, Vol. 111, Issue 5, p. 3577-3613
  • DOI: 10.1021/cr100290v

Catalyst Design with Atomic Layer Deposition
journal, February 2015

  • O’Neill, Brandon J.; Jackson, David H. K.; Lee, Jechan
  • ACS Catalysis, Vol. 5, Issue 3
  • DOI: 10.1021/cs501862h

Atomic layer deposition in the preparation of Bi-metallic, platinum-based catalysts for fuel cell applications
journal, April 2014


Amplified spontaneous emission from ZnO in n-ZnO/ZnO nanodots–SiO 2 composite/p-AlGaN heterojunction light-emitting diodes
journal, March 2009


Buffer layers and transparent conducting oxides for chalcopyrite Cu(In,Ga)(S,Se)2 based thin film photovoltaics: present status and current developments
journal, August 2010

  • Naghavi, N.; Abou-Ras, D.; Allsop, N.
  • Progress in Photovoltaics: Research and Applications, Vol. 18, Issue 6, p. 411-433
  • DOI: 10.1002/pip.955

High-Performance, Air-Stable, Low-Temperature Processed Semitransparent Perovskite Solar Cells Enabled by Atomic Layer Deposition
journal, July 2015


Air-Stable flexible organic light-emitting diodes enabled by atomic layer deposition
journal, December 2014


Atomic Layer Deposition of TiO 2 on Aerogel Templates: New Photoanodes for Dye-Sensitized Solar Cells
journal, June 2008

  • Hamann, Thomas W.; Martinson, Alex B. F.; Elam, Jeffrey W.
  • The Journal of Physical Chemistry C, Vol. 112, Issue 27
  • DOI: 10.1021/jp802216p

Energy storage systems for renewable energy power sector integration and mitigation of intermittency
journal, July 2014

  • Yekini Suberu, Mohammed; Wazir Mustafa, Mohd; Bashir, Nouruddeen
  • Renewable and Sustainable Energy Reviews, Vol. 35
  • DOI: 10.1016/j.rser.2014.04.009

Atomic Layer Deposition: An Overview
journal, January 2010

  • George, Steven M.
  • Chemical Reviews, Vol. 110, Issue 1, p. 111-131
  • DOI: 10.1021/cr900056b

Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
journal, January 2004

  • Lim, Jung Wook; Yun, Sun Jin
  • Electrochemical and Solid-State Letters, Vol. 7, Issue 9
  • DOI: 10.1149/1.1773754

Ultrathin Atomic Layer Deposited TiO 2 for Surface Passivation of Hydrothermally Grown 1D TiO 2 Nanorod Arrays for Efficient Solid-State Perovskite Solar Cells
journal, February 2015

  • Mali, Sawanta S.; Shim, Chang Su; Park, Hui Kyung
  • Chemistry of Materials, Vol. 27, Issue 5
  • DOI: 10.1021/cm504558g

Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
journal, January 2015

  • Clancey, Joel W.; Cavanagh, Andrew S.; Kukreja, Ratandeep S.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 1
  • DOI: 10.1116/1.4901459

Monolithic perovskite/silicon-heterojunction tandem solar cells processed at low temperature
journal, January 2016

  • Albrecht, Steve; Saliba, Michael; Correa Baena, Juan Pablo
  • Energy & Environmental Science, Vol. 9, Issue 1
  • DOI: 10.1039/C5EE02965A

A brief review of atomic layer deposition: from fundamentals to applications
journal, June 2014


Characteristics of vapor–liquid–solid grown silicon nanowire solar cells
journal, August 2009


Ultrathin Lithium-Ion Conducting Coatings for Increased Interfacial Stability in High Voltage Lithium-Ion Batteries
journal, May 2014

  • Park, Joong Sun; Meng, Xiangbo; Elam, Jeffrey W.
  • Chemistry of Materials, Vol. 26, Issue 10
  • DOI: 10.1021/cm500512n

Improvement of the humidity stability of organic–inorganic perovskite solar cells using ultrathin Al2O3 layers prepared by atomic layer deposition
journal, January 2015

  • Dong, Xu; Fang, Xiang; Lv, Minghang
  • Journal of Materials Chemistry A, Vol. 3, Issue 10, p. 5360-5367
  • DOI: 10.1039/C4TA06128D

Chemical vapor deposition and atomic layer deposition for advanced lithium ion batteries and supercapacitors
journal, January 2015

  • Wang, Xinran; Yushin, Gleb
  • Energy & Environmental Science, Vol. 8, Issue 7
  • DOI: 10.1039/C5EE01254F

Gallium Sulfide-Single-Walled Carbon Nanotube Composites: High-Performance Anodes for Lithium-Ion Batteries
journal, July 2014

  • Meng, Xiangbo; He, Kai; Su, Dong
  • Advanced Functional Materials, Vol. 24, Issue 34
  • DOI: 10.1002/adfm.201401002