Dislocation baskets in thick In xGa1–xN epilayers

Wang, Shuo; Xie, Hongen; Liu, Hanxiao; Fischer, Alec M.; McFavilen, Heather; Ponce, Fernando A.

doi:10.1063/1.5042079

Title: Dislocation baskets in thick In _xGa_1–xN epilayers

Journal Article · Tue Sep 11 00:00:00 EDT 2018 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.5042079· OSTI ID:1540240

Wang, Shuo ^[1]; Xie, Hongen ^[1]; Liu, Hanxiao ^[1];

^[1]; McFavilen, Heather ^[2];

^[1]

Arizona State Univ., Tempe, AZ (United States)
PhotoNitride Devices, Inc., Tempe, AZ (United States)

Dislocation clusters have been observed in thick In _xGa_1–xN films with 0.07 ≤ x ≤ 0.12. The clusters resemble baskets with a higher indium content at their interior. Threading dislocations at the basket boundaries are of the misfit edge type, and their separation is consistent with misfit strain relaxation due to the difference in indium content between the baskets and the surrounding matrix. The interior of the base of the baskets reflects no observable dislocations connecting the threading dislocations, and often no net displacements like those due to stacking faults. We believe that the origin of these threading dislocation arrays is associated with misfit dislocations at the basal plane that dissociate, forming stacking faults. And when the stacking faults form simultaneously satisfying the crystal symmetry, the sum of their translation vectors add up to a lattice vector, or equivalently to no change in the stacking sequence, which is consistent with our observations.

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Research Organization:: Arizona State Univ., Tempe, AZ (United States)

Sponsoring Organization:: USDOE Advanced Research Projects Agency - Energy (ARPA-E); National Science Foundation (NSF)

Grant/Contract Number:: AR0000470

OSTI ID:: 1540240

Alternate ID(s):: OSTI ID: 1469438

Journal Information:: Journal of Applied Physics, Vol. 124, Issue 10; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 5 works

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References (24)

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