Stressor-layer-induced elastic strain sharing in SrTiO3 complex oxide sheets

Tilka, J. A.; Park, J.; Ahn, Y.; Pateras, A.; Cai, Z.; Evans, P. G.

doi:10.1063/1.5019920

Title: Stressor-layer-induced elastic strain sharing in SrTiO₃ complex oxide sheets

Journal Article · Mon Feb 26 00:00:00 EST 2018 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.5019920· OSTI ID:1423428

Tilka, J. A. ^[1]; Park, J. ^[1]; Ahn, Y. ^[1];

^[1]; Cai, Z. ^[2];

^[1]

Univ. of Wisconsin-Madison, Madison, WI (United States). Dept. of Materials Science and Engineering
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

A precisely selected elastic strain can be introduced in submicron-thick single-crystal SrTiO3 sheets using silicon nitride stressor layers. Plasma-enhanced chemical vapor deposited conformal silicon nitrate stressor layers produce an elastic strain consistent with the magnitude of the residual stress introduced during the deposition. Synchrotron x-ray nanodiffraction reveals that the strain introduced in the SrTiO3 sheets is on the order of 10-4, which is consistent with the predictions of an elastic model. Elastic strain sharing in complex oxides allows the strain to be selected within a wide and continuous range of values, an effect not achievable in heteroepitaxy on rigid substrates.

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Research Organization:: Univ. of Wisconsin, Madison, WI (United States); Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; National Science Foundation (NSF); University of Wisconsin; USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: FG02-04ER46147; DMR-1121288; DMR-1720415; DGE-1256259; AC02-06CH11357

OSTI ID:: 1423428

Alternate ID(s):: OSTI ID: 1423384; OSTI ID: 1466367

Journal Information:: Applied Physics Letters, Vol. 112, Issue 9; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 1 work

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36 MATERIALS SCIENCE
elastic strain sharing
x-ray nanobeam diffraction
complex oxide materials
functional electronic and magnetic properties
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Title: Stressor-layer-induced elastic strain sharing in SrTiO3 complex oxide sheets

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Title: Stressor-layer-induced elastic strain sharing in SrTiO₃ complex oxide sheets