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Title: Towards Atomic-Scale Fabrication in Silicon

Authors:
ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]
  1. ORNL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1465042
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Conference
Resource Relation:
Journal Volume: 24; Journal Issue: S1; Conference: Microscopy and Microanalysis 2018 - Baltimore, Maryland, United States of America - 8/5/2018 8:00:00 AM-8/9/2018 8:00:00 AM
Country of Publication:
United States
Language:
English

Citation Formats

Hudak, Bethany M., Jesse, Stephen, Song, Jiaming, Borisevich, Albina Y., Snijders, Paul C., Kalinin, Sergei V., and Lupini, Andrew R. Towards Atomic-Scale Fabrication in Silicon. United States: N. p., 2018. Web. doi:10.1017/S1431927618001289.
Hudak, Bethany M., Jesse, Stephen, Song, Jiaming, Borisevich, Albina Y., Snijders, Paul C., Kalinin, Sergei V., & Lupini, Andrew R. Towards Atomic-Scale Fabrication in Silicon. United States. doi:10.1017/S1431927618001289.
Hudak, Bethany M., Jesse, Stephen, Song, Jiaming, Borisevich, Albina Y., Snijders, Paul C., Kalinin, Sergei V., and Lupini, Andrew R. Wed . "Towards Atomic-Scale Fabrication in Silicon". United States. doi:10.1017/S1431927618001289. https://www.osti.gov/servlets/purl/1465042.
@article{osti_1465042,
title = {Towards Atomic-Scale Fabrication in Silicon},
author = {Hudak, Bethany M. and Jesse, Stephen and Song, Jiaming and Borisevich, Albina Y. and Snijders, Paul C. and Kalinin, Sergei V. and Lupini, Andrew R.},
abstractNote = {},
doi = {10.1017/S1431927618001289},
journal = {},
issn = {1431--9276},
number = S1,
volume = 24,
place = {United States},
year = {2018},
month = {8}
}

Conference:
Other availability
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