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U.S. Department of Energy
Office of Scientific and Technical Information

Towards Atomic-Scale Fabrication in Silicon

Conference ·

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
OSTI ID:
1465042
Resource Relation:
Journal Volume: 24; Journal Issue: S1; Conference: Microscopy and Microanalysis 2018 - Baltimore, Maryland, United States of America - 8/5/2018 8:00:00 AM-8/9/2018 8:00:00 AM
Country of Publication:
United States
Language:
English

References (7)