skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Metrology Feasibility Study in Support of the National Direct-Drive Program

Abstract

The 100 Gbar Laser Direct Drive (LDD) program calls for ablator capsules with no defects larger than 0.5 μm in lateral dimension and fewer than ten defects with lateral dimensions between 0.1-0.5 μm. Comparing to Laser Indirect Drive (LID) capsules, this represents >10x reduction of defect length scale and >500x reduction in defect number density. This presents major challenges to both fabrication and metrology. In this paper, we will discuss the proof-of-principle work conducted at General Atomics to identify metrology techniques suitable for 100 Gbar target characterization. We present a detailed studies of dark-field imaging, laser scatterometry, and environmental scanning electron microscopes. We identify dark-field imaging as the best approach for meeting the 100 Gbar metrology needs.

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [1];  [1]
+ Show Author Affiliations
  1. General Atomics, San Diego, CA (United States)
Publication Date:
Research Org.:
General Atomics, San Diego, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1463658
Grant/Contract Number:  
NA0001808
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Fusion Science and Technology
Additional Journal Information:
Journal Volume: 73; Journal Issue: 2; Journal ID: ISSN 1536-1055
Publisher:
American Nuclear Society
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; Laser direct drive; inertial confinement fusion; magnetized liner inertial fusion

Citation Formats

Huang, H., Engelhorn, K., Sequoia, K., Greenwood, A., Sweet, W., Carlson, L., Elsner, F., and Farrell, M. Metrology Feasibility Study in Support of the National Direct-Drive Program. United States: N. p., 2018. Web. doi:10.1080/15361055.2017.1387460.
Copy to clipboard
Huang, H., Engelhorn, K., Sequoia, K., Greenwood, A., Sweet, W., Carlson, L., Elsner, F., & Farrell, M. Metrology Feasibility Study in Support of the National Direct-Drive Program. United States. doi:10.1080/15361055.2017.1387460.
Copy to clipboard
Huang, H., Engelhorn, K., Sequoia, K., Greenwood, A., Sweet, W., Carlson, L., Elsner, F., and Farrell, M. Mon . "Metrology Feasibility Study in Support of the National Direct-Drive Program". United States. doi:10.1080/15361055.2017.1387460. https://www.osti.gov/servlets/purl/1463658.
Copy to clipboard
@article{osti_1463658,
title = {Metrology Feasibility Study in Support of the National Direct-Drive Program},
author = {Huang, H. and Engelhorn, K. and Sequoia, K. and Greenwood, A. and Sweet, W. and Carlson, L. and Elsner, F. and Farrell, M.},
abstractNote = {The 100 Gbar Laser Direct Drive (LDD) program calls for ablator capsules with no defects larger than 0.5 μm in lateral dimension and fewer than ten defects with lateral dimensions between 0.1-0.5 μm. Comparing to Laser Indirect Drive (LID) capsules, this represents >10x reduction of defect length scale and >500x reduction in defect number density. This presents major challenges to both fabrication and metrology. In this paper, we will discuss the proof-of-principle work conducted at General Atomics to identify metrology techniques suitable for 100 Gbar target characterization. We present a detailed studies of dark-field imaging, laser scatterometry, and environmental scanning electron microscopes. We identify dark-field imaging as the best approach for meeting the 100 Gbar metrology needs.},
doi = {10.1080/15361055.2017.1387460},
journal = {Fusion Science and Technology},
issn = {1536-1055},
number = 2,
volume = 73,
place = {United States},
year = {2018},
month = {1}
}
Copy to clipboard
Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI:  10.1080/15361055.2017.1387460
Copyright Statement
Other availability
Search WorldCat Search WorldCat to find libraries that may hold this journal

Figures / Tables:

Fig. 1: Fig. 1:: Scattering regimes as a function of particle size and light wavelength for discrete particles in media. The dashed lines represent constant ratios of particle radius to wavelength, and the red ellipse represents the 100 Gbar defect sizes for optical wavelengths. (adapted from [9]).
All figures and tables (8 total)
Save / Share:
Export Metadata
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.

Works referenced in this record:

Quantitative Data Analysis Method for Precision Radiography
journal, May 2009

  • Huang, H.; Eddinger, S. A.; Stephens, R. B.
  • Fusion Science and Technology, Vol. 55, Issue 4
  • DOI: 10.13182/FST55-380

Point design targets, specifications, and requirements for the 2010 ignition campaign on the National Ignition Facility
journal, May 2011

  • Haan, S. W.; Lindl, J. D.; Callahan, D. A.
  • Physics of Plasmas, Vol. 18, Issue 5
  • DOI: 10.1063/1.3592169

Design of magnetized liner inertial fusion experiments using the Z facility
journal, July 2014

  • Sefkow, A. B.; Slutz, S. A.; Koning, J. M.
  • Physics of Plasmas, Vol. 21, Issue 7
  • DOI: 10.1063/1.4890298

Laser-direct-drive program: Promise, challenge, and path forward
journal, March 2017

  • Campbell, E. M.; Goncharov, V. N.; Sangster, T. C.
  • Matter and Radiation at Extremes, Vol. 2, Issue 2
  • DOI: 10.1016/j.mre.2017.03.001

Scaling magnetized liner inertial fusion on Z and future pulsed-power accelerators
journal, February 2016

  • Slutz, S. A.; Stygar, W. A.; Gomez, M. R.
  • Physics of Plasmas, Vol. 23, Issue 2
  • DOI: 10.1063/1.4941100
    [ × clear filter / sort ]

    Figures / Tables found in this record:

    Fig. 1: (p. 6)figure
    Fig. 2: (p. 7)figure
    Fig. 3: (p. 8)figure
    Fig. 4: (p. 11)figure
    Fig. 5: (p. 12)figure
    Fig. 6: (p. 16)figure
    Fig. 7: (p. 17)figure
    Fig. 8: (p. 19)figure
      [ × clear filter / sort ]
      Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.

      Similar records in OSTI.GOV collections: