Metrology Feasibility Study in Support of the National Direct-Drive Program
- General Atomics, San Diego, CA (United States)
The 100 Gbar Laser Direct Drive (LDD) program calls for ablator capsules with no defects larger than 0.5 μm in lateral dimension and fewer than ten defects with lateral dimensions between 0.1-0.5 μm. Comparing to Laser Indirect Drive (LID) capsules, this represents >10x reduction of defect length scale and >500x reduction in defect number density. This presents major challenges to both fabrication and metrology. In this paper, we will discuss the proof-of-principle work conducted at General Atomics to identify metrology techniques suitable for 100 Gbar target characterization. We present a detailed studies of dark-field imaging, laser scatterometry, and environmental scanning electron microscopes. We identify dark-field imaging as the best approach for meeting the 100 Gbar metrology needs.
- Research Organization:
- General Atomics, San Diego, CA (United States)
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- NA0001808
- OSTI ID:
- 1463658
- Journal Information:
- Fusion Science and Technology, Vol. 73, Issue 2; ISSN 1536-1055
- Publisher:
- American Nuclear SocietyCopyright Statement
- Country of Publication:
- United States
- Language:
- English
Similar Records
Trending low mode asymmetries in NIF capsule drive using a simple viewfactor metric *
The National Direct-Drive Program: OMEGA to the National Ignition Facility