skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Top-Down Etching of Three-Dimensional High Aspect Ratio GaN Nanostructures (invited).

Conference ·
OSTI ID:1463429

Abstract not provided.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Laboratories, null
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1463429
Report Number(s):
SAND2017-8157C; 655835
Resource Relation:
Conference: Proposed for presentation at the ACCGE-21/OMVPE-18 held July 30 - August 4, 2017 in Santa Fe, NM.
Country of Publication:
United States
Language:
English