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Title: Activation of buried p-GaN in MOCVD-regrown vertical structures

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.5041879· OSTI ID:1463218
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  1. School of Electrical and Computer Engineering, Cornell University, Ithaca, New York 14853, USA
  2. IQE RF LLC, Somerset, New Jersey 08873, USA
  3. Qorvo, Inc., Richardson, Texas 75080, USA
  4. School of Electrical and Computer Engineering, Cornell University, Ithaca, New York 14853, USA, Department of Material Science and Engineering, Cornell University, Ithaca, New York 14853, USA

Sponsoring Organization:
USDOE Advanced Research Projects Agency - Energy (ARPA-E)
Grant/Contract Number:
AR0000454
OSTI ID:
1463218
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 113 Journal Issue: 6; ISSN 0003-6951
Publisher:
American Institute of PhysicsCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 29 works
Citation information provided by
Web of Science

References (35)

GaN HBT: toward an RF device journal March 2001
Hole Compensation Mechanism of P-Type GaN Films journal May 1992
GaN-Based Light Emitting Diodes with Tunnel Junctions journal August 2001
880 V/ $2.7~\text{m}\Omega\cdot\text{cm}^{\text{2}}$ MIS Gate Trench CAVET on Bulk GaN Substrates journal June 2018
Development of GaN Vertical Trench-MOSFET With MBE Regrown Channel journal June 2018
Thermal Annealing Effects on P-Type Mg-Doped GaN Films journal February 1992
Hydrogen passivation of Mg acceptors in GaN grown by metalorganic chemical vapor deposition journal October 1995
In Situ Oxide, GaN Interlayer-Based Vertical Trench MOSFET (OG-FET) on Bulk GaN substrates journal March 2017
Local vibrational modes of the Mg–H acceptor complex in GaN journal December 1996
Near unity ideality factor and Shockley-Read-Hall lifetime in GaN-on-GaN p-n diodes with avalanche breakdown journal December 2015
1.8 mΩ·cm 2 vertical GaN-based trench metal–oxide–semiconductor field-effect transistors on a free-standing GaN substrate for 1.2-kV-class operation journal April 2015
Fermi level dependence of hydrogen diffusivity in GaN journal September 2001
First-Principles Calculations on Mg Impurity and Mg-H Complex in GaN journal July 1996
Lateral current spreading in GaN-based light-emitting diodes utilizing tunnel contact junctions journal May 2001
Mechanism for low temperature activation of Mg-doped GaN with Ni catalysts journal December 2001
Normally OFF Trench CAVET With Active Mg-Doped GaN as Current Blocking Layer journal March 2017
Memory Effect and Redistribution of Mg into Sequentially Regrown GaN Layer by Metalorganic Chemical Vapor Deposition journal January 2003
Activation of p-Type GaN in a Pure Oxygen Ambient journal May 2001
1.1-kV Vertical GaN p-n Diodes With p-GaN Regrown by Molecular Beam Epitaxy journal August 2017
1.5-kV and 2.2-m<inline-formula> <tex-math notation="TeX">\(\Omega \) </tex-math></inline-formula>-cm<inline-formula> <tex-math notation="TeX">\(^{2}\) </tex-math></inline-formula> Vertical GaN Transistors on Bulk-GaN Substrates journal September 2014
Candela‐class high‐brightness InGaN/AlGaN double‐heterostructure blue‐light‐emitting diodes journal March 1994
Hydrogen in GaN: Novel Aspects of a Common Impurity journal December 1995
Vertical GaN p-n Junction Diodes With High Breakdown Voltages Over 4 kV journal November 2015
600 V/ $1.7~\Omega$ Normally-Off GaN Vertical Trench Metal–Oxide–Semiconductor Field-Effect Transistor journal November 2016
Role of hydrogen in doping of GaN journal March 1996
Design, fabrication, and performance analysis of GaN vertical electron transistors with a buried p/n junction journal May 2015
Influence of oxygen on the activation of p -type GaN journal April 2000
Very high voltage operation (>330 V) with high current gain of AlGaN/GaN HBTs journal March 2003
GaN-on-Si Quasi-Vertical Power MOSFETs journal January 2018
Lateral Hydrogen Diffusion at p-GaN Layers in Nitride-Based Light Emitting Diodes with Tunnel Junctions journal August 2013
Low Temperature Activation of Mg-Doped GaN in O2 Ambient journal February 2002
P-Type Conduction in Mg-Doped GaN Treated with Low-Energy Electron Beam Irradiation (LEEBI) journal December 1989
Design and Realization of GaN Trench Junction-Barrier-Schottky-Diodes journal April 2017
High voltage and high current density vertical GaN power diodes journal June 2016
AlGaN/GaN heterojunction bipolar transistor journal June 1999