Higher-K Formation in Atomic Layer Deposited Hf1-XAlxOy
Journal Article
·
· ECS Transactions (Online)
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Sponsoring Organization:
- DOE - BASIC ENERGY SCIENCES
- OSTI ID:
- 1461679
- Journal Information:
- ECS Transactions (Online), Vol. 64, Issue 9; ISSN 1938-6737
- Publisher:
- Electrochemical Society
- Country of Publication:
- United States
- Language:
- ENGLISH
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