Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry

Huang, Lei; Nicolas, Josep; Idir, Mourad

doi:10.1364/OE.26.020192

Title: Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry

Journal Article · Wed Jul 25 00:00:00 EDT 2018 · Optics Express

DOI:https://doi.org/10.1364/OE.26.020192· OSTI ID:1461596

;

; Idir, Mourad

Recently we presented one-dimensional Angular-measurement-based Stitching Interferometry (ASI) technique for synchrotron mirror metrology coupling an autocollimator and a white light interferometer. In this work, we conduct a further study on the measurement repeatability of this technique under different conditions, e.g. different scanning time or lengths with/without system drift. The similarity between the angle measuring stitching technique in ASI and the slope integration technique in deflectometry is addressed. The analytic expression of the height repeatability is derived while the slope noise is a zero-mean uncorrelated additive noise. In addition, we use a set of typical stationary signals from the autocollimator and the white light interferometer in a real experiment to simulate numerous virtual scans for the numerical calculation of the measurement repeatability under different measurement conditions. The simulation result predicts a link between the measurement repeatability and the scanning time with a constant speed. Moreover, it indicates that the major factor affecting the repeatability of our current ASI system is the system drift error.

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Research Organization:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: No. DE-SC0012704; SC0012704

OSTI ID:: 1461596

Alternate ID(s):: OSTI ID: 1469786

Report Number(s):: BNL-209029-2018-JAAM; OPEXFF

Journal Information:: Optics Express, Journal Name: Optics Express Vol. 26 Journal Issue: 16; ISSN 1094-4087

Publisher:: Optical Society of AmericaCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 3 works

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References (17)

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Surface shape determination with a stitching Michelson interferometer and accuracy evaluation Polack, F.; Thomasset, M.; Brochet, S. Review of Scientific Instruments, Vol. 90, Issue 2 https://doi.org/10.1063/1.5061930	journal	February 2019

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