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Title: Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope

Abstract

Aberration correction by an electron mirror dramatically improves the spatial resolution and transmission of photoemission electron microscopes. We will review the performance of the recently installed aberration corrector of the X-ray Photoemission Electron Microscope PEEM-3 and show a large improvement in the efficiency of the electron optics. Hartmann testing is introduced as a quantitative method to measure the geometrical aberrations of a cathode lens electron microscope. Here, we find that aberration correction leads to an order of magnitude reduction of the spherical aberrations, suggesting that a spatial resolution of below 100 nm is possible at 100% transmission of the optics when using x-rays. We demonstrate this improved performance by imaging test patterns employing element and magnetic contrast.

Authors:
ORCiD logo [1]; ORCiD logo [1];  [1];  [1];  [1];  [1];  [2];  [3]; ORCiD logo [1];  [1];  [1]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Materials Sciences Division
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Materials Sciences Division; Univ. of California, Santa Cruz, CA (United States). Dept. of Physics
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1461143
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Ultramicroscopy
Additional Journal Information:
Journal Volume: 188; Journal Issue: C; Journal ID: ISSN 0304-3991
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE

Citation Formats

Scholl, A., Marcus, M. A., Doran, A., Nasiatka, J. R., Young, A. T., MacDowell, A. A., Streubel, R., Kent, N., Feng, J., Wan, W., and Padmore, H. A.. Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope. United States: N. p., 2018. Web. doi:10.1016/j.ultramic.2018.03.010.
Scholl, A., Marcus, M. A., Doran, A., Nasiatka, J. R., Young, A. T., MacDowell, A. A., Streubel, R., Kent, N., Feng, J., Wan, W., & Padmore, H. A.. Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope. United States. doi:10.1016/j.ultramic.2018.03.010.
Scholl, A., Marcus, M. A., Doran, A., Nasiatka, J. R., Young, A. T., MacDowell, A. A., Streubel, R., Kent, N., Feng, J., Wan, W., and Padmore, H. A.. Sat . "Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope". United States. doi:10.1016/j.ultramic.2018.03.010.
@article{osti_1461143,
title = {Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope},
author = {Scholl, A. and Marcus, M. A. and Doran, A. and Nasiatka, J. R. and Young, A. T. and MacDowell, A. A. and Streubel, R. and Kent, N. and Feng, J. and Wan, W. and Padmore, H. A.},
abstractNote = {Aberration correction by an electron mirror dramatically improves the spatial resolution and transmission of photoemission electron microscopes. We will review the performance of the recently installed aberration corrector of the X-ray Photoemission Electron Microscope PEEM-3 and show a large improvement in the efficiency of the electron optics. Hartmann testing is introduced as a quantitative method to measure the geometrical aberrations of a cathode lens electron microscope. Here, we find that aberration correction leads to an order of magnitude reduction of the spherical aberrations, suggesting that a spatial resolution of below 100 nm is possible at 100% transmission of the optics when using x-rays. We demonstrate this improved performance by imaging test patterns employing element and magnetic contrast.},
doi = {10.1016/j.ultramic.2018.03.010},
journal = {Ultramicroscopy},
number = C,
volume = 188,
place = {United States},
year = {Sat Mar 10 00:00:00 EST 2018},
month = {Sat Mar 10 00:00:00 EST 2018}
}

Journal Article:
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This content will become publicly available on March 10, 2019
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