Optical properties of oxygen vacancies in HfO 2 thin films studied by absorption and luminescence spectroscopy

Papernov, S.; Brunsman, M. D.; Oliver, J. B.; Hoffman, B. N.; Kozlov, A. A.; Demos, S. G.; Shvydky, A.; Cavalcante, F. H. M.; Yang, L.; Menoni, C. S.; Roshanzadeh, B.; Boyd, S. T. P.; Emmert, L. A.; Rudolph, W.

doi:10.1364/OE.26.017608

Title: Optical properties of oxygen vacancies in HfO ₂ thin films studied by absorption and luminescence spectroscopy

Journal Article · Thu Jun 21 00:00:00 EDT 2018 · Optics Express

DOI:https://doi.org/10.1364/OE.26.017608· OSTI ID:1456278

Papernov, S.; Brunsman, M. D.; Oliver, J. B.; Hoffman, B. N.; Kozlov, A. A.; Demos, S. G.; Shvydky, A.; Cavalcante, F. H. M.; Yang, L.;

;

; Boyd, S. T. P.; Emmert, L. A.; Rudolph, W.

Hafnium oxide thin films with varying oxygen content were investigated with the goal of finding the optical signature of oxygen vacancies in the film structure. It was found that a reduction of oxygen content in the film leads to changes in both, structural and optical characteristics. Optical absorption spectroscopy, using nanoKelvin calorimetry, revealed an enhanced absorption in the near-ultraviolet (near-UV) and visible wavelength ranges for films with reduced oxygen content, which was attributed to mid-gap electronic states of oxygen vacancies. Absorption in the near-infrared was found to originate from structural defects other than oxygen vacancy. Luminescence generated by continuous-wave 355-nm laser excitation in e beam films showed significant changes in the spectral profile with oxygen reduction and new band formation linked to oxygen vacancies. The luminescence from oxygen-vacancy states was found to have microsecond-scale lifetimes when compared with nanosecond-scale lifetimes of luminescence attributed to other structural film defects. In conclusion, laser-damage testing using ultraviolet nanosecond and infrared femtosecond pulses showed a reduction of the damage threshold with increasing number of oxygen vacancies in hafnium oxide films.

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Research Organization:: Univ. of Rochester, NY (United States). Lab. for Laser Energetics

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); Univ. of Rochester, NY (United States); New York State Energy Research and Development Authority

Grant/Contract Number:: NA0001944

OSTI ID:: 1456278

Alternate ID(s):: OSTI ID: 1459414

Report Number(s):: 2017-239; 2-370; OPEXFF

Journal Information:: Optics Express, Journal Name: Optics Express Vol. 26 Journal Issue: 13; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 41 works

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