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Title: Optical properties of oxygen vacancies in HfO 2 thin films studied by absorption and luminescence spectroscopy

Abstract

Hafnium oxide thin films with varying oxygen content were investigated with the goal of finding the optical signature of oxygen vacancies in the film structure. It was found that a reduction of oxygen content in the film leads to changes in both, structural and optical characteristics. Optical absorption spectroscopy, using nanoKelvin calorimetry, revealed an enhanced absorption in the near-ultraviolet (near-UV) and visible wavelength ranges for films with reduced oxygen content, which was attributed to mid-gap electronic states of oxygen vacancies. Absorption in the near-infrared was found to originate from structural defects other than oxygen vacancy. Luminescence generated by continuous-wave 355-nm laser excitation in e beam films showed significant changes in the spectral profile with oxygen reduction and new band formation linked to oxygen vacancies. The luminescence from oxygen-vacancy states was found to have microsecond-scale lifetimes when compared with nanosecond-scale lifetimes of luminescence attributed to other structural film defects. In conclusion, laser-damage testing using ultraviolet nanosecond and infrared femtosecond pulses showed a reduction of the damage threshold with increasing number of oxygen vacancies in hafnium oxide films.

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [1];  [2];  [2]; ORCiD logo [2]; ORCiD logo [3];  [3];  [3];  [3]
  1. Univ. of Rochester, NY (United States). Lab. for Laser Energetics
  2. Colorado State Univ., Fort Collins, CO (United States)
  3. Univ. of New Mexico, Albuquerque, NM (United States). Dept. of Physics and Astronomy
Publication Date:
Research Org.:
Univ. of Rochester, NY (United States). Lab. for Laser Energetics
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA); Univ. of Rochester, NY (United States); New York State Energy Research and Development Authority
OSTI Identifier:
1459414
Report Number(s):
2017-239; 2-370
Journal ID: ISSN 1094-4087; OPEXFF; 2017-239, 1413, 2370
Grant/Contract Number:
NA0001944
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 26; Journal Issue: 13; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Papernov, S., Brunsman, M. D., Oliver, J. B., Hoffman, B. N., Kozlov, A. A., Demos, S. G., Shvydky, A., Cavalcante, F. H. M., Yang, L., Menoni, C. S., Roshanzadeh, B., Boyd, S. T. P., Emmert, L. A., and Rudolph, W. Optical properties of oxygen vacancies in HfO2 thin films studied by absorption and luminescence spectroscopy. United States: N. p., 2018. Web. doi:10.1364/OE.26.017608.
Papernov, S., Brunsman, M. D., Oliver, J. B., Hoffman, B. N., Kozlov, A. A., Demos, S. G., Shvydky, A., Cavalcante, F. H. M., Yang, L., Menoni, C. S., Roshanzadeh, B., Boyd, S. T. P., Emmert, L. A., & Rudolph, W. Optical properties of oxygen vacancies in HfO2 thin films studied by absorption and luminescence spectroscopy. United States. doi:10.1364/OE.26.017608.
Papernov, S., Brunsman, M. D., Oliver, J. B., Hoffman, B. N., Kozlov, A. A., Demos, S. G., Shvydky, A., Cavalcante, F. H. M., Yang, L., Menoni, C. S., Roshanzadeh, B., Boyd, S. T. P., Emmert, L. A., and Rudolph, W. Thu . "Optical properties of oxygen vacancies in HfO2 thin films studied by absorption and luminescence spectroscopy". United States. doi:10.1364/OE.26.017608. https://www.osti.gov/servlets/purl/1459414.
@article{osti_1459414,
title = {Optical properties of oxygen vacancies in HfO2 thin films studied by absorption and luminescence spectroscopy},
author = {Papernov, S. and Brunsman, M. D. and Oliver, J. B. and Hoffman, B. N. and Kozlov, A. A. and Demos, S. G. and Shvydky, A. and Cavalcante, F. H. M. and Yang, L. and Menoni, C. S. and Roshanzadeh, B. and Boyd, S. T. P. and Emmert, L. A. and Rudolph, W.},
abstractNote = {Hafnium oxide thin films with varying oxygen content were investigated with the goal of finding the optical signature of oxygen vacancies in the film structure. It was found that a reduction of oxygen content in the film leads to changes in both, structural and optical characteristics. Optical absorption spectroscopy, using nanoKelvin calorimetry, revealed an enhanced absorption in the near-ultraviolet (near-UV) and visible wavelength ranges for films with reduced oxygen content, which was attributed to mid-gap electronic states of oxygen vacancies. Absorption in the near-infrared was found to originate from structural defects other than oxygen vacancy. Luminescence generated by continuous-wave 355-nm laser excitation in e beam films showed significant changes in the spectral profile with oxygen reduction and new band formation linked to oxygen vacancies. The luminescence from oxygen-vacancy states was found to have microsecond-scale lifetimes when compared with nanosecond-scale lifetimes of luminescence attributed to other structural film defects. In conclusion, laser-damage testing using ultraviolet nanosecond and infrared femtosecond pulses showed a reduction of the damage threshold with increasing number of oxygen vacancies in hafnium oxide films.},
doi = {10.1364/OE.26.017608},
journal = {Optics Express},
number = 13,
volume = 26,
place = {United States},
year = {Thu Jun 21 00:00:00 EDT 2018},
month = {Thu Jun 21 00:00:00 EDT 2018}
}

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