Emerging nanofabrication and quantum confinement techniques for 2D materials beyond graphene

Stanford, Michael G.; Rack, Philip D.; Jariwala, Deep

doi:10.1038/s41699-018-0065-3

Title: Emerging nanofabrication and quantum confinement techniques for 2D materials beyond graphene

Journal Article · Mon Jul 16 00:00:00 EDT 2018 · npj 2D Materials and Applications

DOI:https://doi.org/10.1038/s41699-018-0065-3· OSTI ID:1457467

Stanford, Michael G.; Rack, Philip D.; Jariwala, Deep

Abstract Recent advances in growth techniques have enabled the synthesis of high-quality large area films of 2D materials beyond graphene. As a result, nanofabrication methods must be developed for high-resolution and precise processing of these atomically thin materials. These developments are critical both for the integration of 2D materials in complex, integrated circuitry, as well as the creation of sub-wavelength and quantum-confined nanostructures and devices which allow the study of novel physical phenomena. In this review, we summarize recent advances in post-synthesis nanopatterning and nanofabrication techniques of 2D materials which include (1) etching techniques, (2) atomic modification, and (3) emerging nanopatterning techniques. We detail novel phenomena and devices which have been enabled by the recent advancement in nanofabrication techniques and comment on future outlook of 2D materials beyond graphene.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: DOE DE-SC0002136

OSTI ID:: 1457467

Journal Information:: npj 2D Materials and Applications, Journal Name: npj 2D Materials and Applications Vol. 2 Journal Issue: 1; ISSN 2397-7132

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 93 works

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Beyond Graphene: Progress in Novel Two-Dimensional Materials and van der Waals Solids Das, Saptarshi; Robinson, Joshua A.; Dubey, Madan Annual Review of Materials Research, Vol. 45, Issue 1 https://doi.org/10.1146/annurev-matsci-070214-021034	journal	July 2015
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Bandgap Engineering of Phosphorene by Laser Oxidation toward Functional 2D Materials Lu, Junpeng; Wu, Jing; Carvalho, Alexandra ACS Nano, Vol. 9, Issue 10 https://doi.org/10.1021/acsnano.5b04623	journal	September 2015
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Chloride Molecular Doping Technique on 2D Materials: WS ₂ and MoS ₂ Yang, Lingming; Majumdar, Kausik; Liu, Han Nano Letters, Vol. 14, Issue 11 https://doi.org/10.1021/nl502603d	journal	October 2014
Highly Conductive Porous Transition Metal Dichalcogenides via Water Steam Etching for High-Performance Lithium–Sulfur Batteries Xiao, Zhubing; Yang, Zhi; Zhou, Liujiang ACS Applied Materials & Interfaces, Vol. 9, Issue 22 https://doi.org/10.1021/acsami.7b04232	journal	May 2017
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Atomic-layer soft plasma etching of MoS2 Xiao, Shaoqing; Xiao, Peng; Zhang, Xuecheng Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep19945	journal	January 2016
2H → 1T phase transition and hydrogen evolution activity of MoS ₂ , MoSe ₂ , WS ₂ and WSe ₂ strongly depends on the MX ₂ composition Ambrosi, Adriano; Sofer, Zdeněk; Pumera, Martin Chemical Communications, Vol. 51, Issue 40 https://doi.org/10.1039/C5CC00803D	journal	January 2015
Strong Modulation of Optical Properties in Black Phosphorus through Strain-Engineered Rippling Quereda, Jorge; San-Jose, Pablo; Parente, Vincenzo Nano Letters, Vol. 16, Issue 5 https://doi.org/10.1021/acs.nanolett.5b04670	journal	April 2016
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