Three-dimensional nanoscale characterisation of materials by atom probe tomography

Devaraj, Arun; Perea, Daniel E.; Liu, Jia; Gordon, Lyle M.; Prosa, Ty. J.; Parikh, Pritesh; Diercks, David R.; Meher, Subhashish; Kolli, R. Prakash; Meng, Ying Shirley; Thevuthasan, Suntharampillai

doi:10.1080/09506608.2016.1270728

Title: Three-dimensional nanoscale characterisation of materials by atom probe tomography

Journal Article · Wed Nov 09 00:00:00 EST 2016 · International Materials Reviews

DOI:https://doi.org/10.1080/09506608.2016.1270728· OSTI ID:1455265

Devaraj, Arun ^[1]; Perea, Daniel E. ^[2]; Liu, Jia ^[2]; Gordon, Lyle M. ^[2]; Prosa, Ty. J. ^[3]; Parikh, Pritesh ^[4];

^[5]; Meher, Subhashish ^[6];

^[7]; Meng, Ying Shirley ^[4]; Thevuthasan, Suntharampillai ^[8]

Physical and Computational Sciences Directorate, Pacific Northwest National Laboratory, Richland, WA, USA
Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory, Richland, WA, USA
CAMECA Instruments, Madison, WI, USA
Laboratory of Energy Storage and Conversion, Department of NanoEngineering, University of California, San Diego, CA, USA
Colorado Center for Advanced Ceramics, Department of Metallurgical and Materials Engineering, Colorado School of Mines, Golden, CO, USA
Materials Science and Engineering Department, Idaho National Laboratory, Idaho Falls, ID, USA
Department of Materials Science and Engineering, University of Maryland, College Park, MD, USA
Qatar Environment and Energy Research Institute, Qatar Foundation, Doha, Qatar

The development of three-dimensional (3D), characterization techniques with high spatial and mass resolution is crucial for understanding and developing advanced materials for many engineering applications as well as for understanding natural materials. In recent decades, atom probe tomography (APT) which combines a point projection microscope and time-of-flight mass spectrometer has evolved to be an excellent characterization technique capable of providing 3D nanoscale characterization of materials with sub-nanometer scale spatial resolution, with equal sensitivity for all elements. This review discusses the current state as of beginning of the year 2016 of APT instrumentation, new developments in sample preparation methods, experimental procedures for different material classes, reconstruction of APT results, the current status of correlative microscopy, and application of APT for microstructural characterization in established scientific areas like structural materials as well as new applications in semiconducting nanowires, semiconductor devices, battery materials, catalyst materials, geological materials and biological materials. Finally, a brief perspective is given regarding the future of APT.

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Research Organization:: Pacific Northwest National Laboratory (PNNL), Richland, WA (United States). Environmental Molecular Sciences Laboratory (EMSL)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC05-76RL01830

OSTI ID:: 1455265

Report Number(s):: PNNL-SA-117399; 49095

Journal Information:: International Materials Reviews, Vol. 63, Issue 2; ISSN 0950-6608

Publisher:: Taylor & Francis

Country of Publication:: United States

Language:: English

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Atom-Probe Tomography Miller, Michael K.; Forbes, Richard G. Springer New York, NY https://doi.org/10.1007/978-1-4899-7430-3	book	January 2014
Approaches for Promoting Accurate Atom Probe Reconstruction Prosa, T. J.; Geiser, B. P.; Reinhard, D. Microscopy and Microanalysis, Vol. 22, Issue S3 https://doi.org/10.1017/S1431927616004177	journal	July 2016
The rise of computational techniques in atom probe microscopy Ceguerra, Anna V.; Breen, Andrew J.; Stephenson, Leigh T. Current Opinion in Solid State and Materials Science, Vol. 17, Issue 5 https://doi.org/10.1016/j.cossms.2013.09.006	journal	October 2013
Atom probe tomography spatial reconstruction: Status and directions Larson, D. J.; Gault, B.; Geiser, B. P. Current Opinion in Solid State and Materials Science, Vol. 17, Issue 5 https://doi.org/10.1016/j.cossms.2013.09.002	journal	October 2013
Partitioning and site occupancy of Ta and Mo in Co-base γ/γ′ alloys studied by atom probe tomography Meher, S.; Banerjee, R. Intermetallics, Vol. 49 https://doi.org/10.1016/j.intermet.2014.01.020	journal	June 2014
Characterization of Oxidation and Reduction of Pt–Ru and Pt–Rh–Ru Alloys by Atom Probe Tomography and Comparison with Pt–Rh Li, Tong; Bagot, Paul A. J.; Marquis, Emmanuelle A. The Journal of Physical Chemistry C, Vol. 116, Issue 33 https://doi.org/10.1021/jp304359m	journal	August 2012
Chemical mapping of mammalian cells by atom probe tomography Narayan, Kedar; Prosa, Ty J.; Fu, Jing Journal of Structural Biology, Vol. 178, Issue 2 https://doi.org/10.1016/j.jsb.2011.12.016	journal	May 2012
Kinetic-Energy Discrimination for Atom Probe Tomography: Review Article Kelly, Thomas F. Microscopy and Microanalysis, Vol. 17, Issue 1 https://doi.org/10.1017/S1431927610094468	journal	January 2011
Co-Precipitated and Collocated Carbides and Cu-Rich Precipitates in a Fe–Cu Steel Characterized by Atom-Probe Tomography Kolli, R. Prakash; Seidman, David N. Microscopy and Microanalysis, Vol. 20, Issue 6 https://doi.org/10.1017/S1431927614013221	journal	September 2014
Structure analysis of a precipitate phase in an Ni-rich high-temperature NiTiHf shape memory alloy Yang, F.; Coughlin, D. R.; Phillips, P. J. Acta Materialia, Vol. 61, Issue 9 https://doi.org/10.1016/j.actamat.2013.02.023	journal	May 2013
Organic Materials and Organic/Inorganic Heterostructures in Atom Probe Tomography Joester, Derk; Hillier, Andrew; Zhang, Yi Microscopy Today, Vol. 20, Issue 3 https://doi.org/10.1017/S1551929512000260	journal	May 2012
Atom probe tomography characterization of solute segregation to dislocations Miller, Michael K. Microscopy Research and Technique, Vol. 69, Issue 5 https://doi.org/10.1002/jemt.20291	journal	January 2006
Contributions of atom probe tomography to the understanding of nickel-based superalloys Miller, M. K. Micron, Vol. 32, Issue 8 https://doi.org/10.1016/S0968-4328(00)00083-4	journal	January 2001
Linear complexions: Confined chemical and structural states at dislocations Kuzmina, M.; Herbig, M.; Ponge, D. Science, Vol. 349, Issue 6252 https://doi.org/10.1126/science.aab2633	journal	September 2015
Atom-probe for FinFET dopant characterization Kambham, A. K.; Mody, J.; Gilbert, M. Ultramicroscopy, Vol. 111, Issue 6 https://doi.org/10.1016/j.ultramic.2011.01.017	journal	May 2011
Identification of an Intrinsic Source of Doping Inhomogeneity in Vapor–Liquid–Solid-Grown Nanowires Connell, Justin G.; Yoon, KunHo; Perea, Daniel E. Nano Letters, Vol. 13, Issue 1 https://doi.org/10.1021/nl3038695	journal	December 2012
Correction of dead time effects in laser-induced desorption time-of-flight mass spectrometry: Applications in atom probe tomography Stephan, Thomas; Heck, Philipp R.; Isheim, Dieter International Journal of Mass Spectrometry, Vol. 379 https://doi.org/10.1016/j.ijms.2014.12.006	journal	March 2015
The temporal evolution of the decomposition of a concentrated multicomponent Fe–Cu-based steel Prakash Kolli, R.; Seidman, David N. Acta Materialia, Vol. 56, Issue 9 https://doi.org/10.1016/j.actamat.2007.12.044	journal	May 2008
A procedure for quantification of precipitate microstructures from three-dimensional atom probe data Vaumousse, D.; Cerezo, A.; Warren, P. J. Ultramicroscopy, Vol. 95 https://doi.org/10.1016/S0304-3991(02)00319-4	journal	May 2003
Effects of detector dead-time on quantitative analyses involving boron and multi-hit detection events in atom probe tomography Meisenkothen, Frederick; Steel, Eric B.; Prosa, Ty J. Ultramicroscopy, Vol. 159 https://doi.org/10.1016/j.ultramic.2015.07.009	journal	December 2015
Optimized Laser Thermal Pulsing of Atom Probe Tomography: LEAP 4000X™ Bunton, J.; Olson, J.; Lenz, D. Microscopy and Microanalysis, Vol. 16, Issue S2 https://doi.org/10.1017/S1431927610060241	journal	July 2010
Visualizing nanoscale 3D compositional fluctuation of lithium in advanced lithium-ion battery cathodes Devaraj, A.; Gu, M.; Colby, R. Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms9014	journal	August 2015
3D analysis of advanced nano-devices using electron and atom probe tomography Grenier, A.; Duguay, S.; Barnes, J. P. Ultramicroscopy, Vol. 136 https://doi.org/10.1016/j.ultramic.2013.10.001	journal	January 2014
Experimental Evaluation of Conditions Affecting Specimen Survivability in Atom Probe Tomography Prosa, T. J.; Lawrence, D.; Olson, D. Microscopy and Microanalysis, Vol. 21, Issue S3 https://doi.org/10.1017/S1431927615005048	journal	August 2015
Embrittlement of RPV steels: An atom probe tomography perspective Miller, M. K.; Russell, K. F. Journal of Nuclear Materials, Vol. 371, Issue 1-3 https://doi.org/10.1016/j.jnucmat.2007.05.003	journal	September 2007
In situ site-specific specimen preparation for atom probe tomography Thompson, K.; Lawrence, D.; Larson, D. J. Ultramicroscopy, Vol. 107, Issue 2-3 https://doi.org/10.1016/j.ultramic.2006.06.008	journal	February 2007
Atom probe tomography for advanced metallization Mangelinck, D.; Panciera, F.; Hoummada, K. Microelectronic Engineering, Vol. 120 https://doi.org/10.1016/j.mee.2013.12.018	journal	May 2014
Subsurface synthesis and characterization of Ag nanoparticles embedded in MgO Vilayurganapathy, S.; Devaraj, A.; Colby, R. Nanotechnology, Vol. 24, Issue 9 https://doi.org/10.1088/0957-4484/24/9/095707	journal	February 2013
Simulation of heterogeneous atom probe tip shapes evolution during field evaporation using a level set method and different evaporation models Xu, Zhijie; Li, Dongsheng; Xu, Wei Computer Physics Communications, Vol. 189 https://doi.org/10.1016/j.cpc.2014.12.016	journal	April 2015
Analysis of Bulk Dielectrics with Atom Probe Tomography Larson, Dj; Alvis, Rl; Lawrence, Df Microscopy and Microanalysis, Vol. 14, Issue S2 https://doi.org/10.1017/S1431927608083657	journal	August 2008
An analytical model accounting for tip shape evolution during atom probe analysis of heterogeneous materials Rolland, N.; Larson, D. J.; Geiser, B. P. Ultramicroscopy, Vol. 159 https://doi.org/10.1016/j.ultramic.2015.03.010	journal	December 2015
Identification of a Ni0.5(Al0.5−xMnx) B2 phase at the heterophase interfaces of Cu-rich precipitates in an α-Fe matrix Kolli, R. Prakash; Mao, Zugang; Seidman, David N. Applied Physics Letters, Vol. 91, Issue 24 https://doi.org/10.1063/1.2820378	journal	December 2007
Atom probe crystallography Gault, Baptiste; Moody, Michael P.; Cairney, Julie M. Materials Today, Vol. 15, Issue 9 https://doi.org/10.1016/S1369-7021(12)70164-5	journal	September 2012
Towards better 3-D reconstructions by combining electron tomography and atom-probe tomography Arslan, Ilke; Marquis, Emmanuelle A.; Homer, Mark Ultramicroscopy, Vol. 108, Issue 12 https://doi.org/10.1016/j.ultramic.2008.05.008	journal	November 2008

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