Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries

Journal Article · Fri Mar 30 00:00:00 EDT 2018 · Chemistry of Materials

DOI:https://doi.org/10.1021/acs.chemmater.7b04666· OSTI ID:1441462

Stewart, David M.  ^[1]; Pearse, Alexander J. ^[2]; Kim, Nam S. ^[3]; Fuller, Elliot J. ^[4]; Talin, A. Alec  ^[4]; Gregorczyk, Keith  ^[2]; Lee, Sang Bok ^[3]; Rubloff, Gary W. ^[5]

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1. Univ. of Maryland, College Park, MD (United States). Institute for Systems Research
2. Univ. of Maryland, College Park, MD (United States). Department of Materials Science and Engineering
3. Univ. of Maryland, College Park, MD (United States). Department of Chemistry
4. Sandia National Lab. (SNL-CA), Livermore, CA (United States). Materials Physics Department
5. Univ. of Maryland, College Park, MD (United States). Institute for Systems Research, Department of Materials Science and Engineering and Institute for Research in Electronics and Applied Physics

Major advances in thin-film solid-state batteries (TFSSBs) may capitalize on 3D structuring using high-aspect-ratio substrates such as nanoscale pits, pores, trenches, flexible polymers, and textiles. This will require conformal processes such as atomic layer deposition (ALD) for every active functional component of the battery. In this paper, we explore the deposition and electrochemical properties of SnO₂, SnN_y, and SnO_xN_y thin films as TFSSB anode materials, grown by ALD using tetrakisdimethylamido(tin), H₂O, and N₂ plasma as precursors. By controlling the dose ratio between H₂O and N₂, the N–O fraction can be tuned between 0% N and 95% N. The electrochemical properties of these materials were tested across a composition range varying from pure SnO₂, to SnON intermediates, and pure SnNy. In TFSSBs, the SnNy anodes are found to be more stable during cycling than the SnO₂ or SnO_xN_y films, with an initial reversible capacity beyond that of Li–Sn alloying, retaining 75% of their capacity over 200 cycles compared to only 50% for SnO₂. Lastly, the performance of the SnO_xN_y anodes indicates that SnN_y anodes should not be negatively impacted by small levels of O contamination.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Energy Frontier Research Centers (EFRC) (United States). Nanostructures for Electrical Energy Storage (NEES)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE National Nuclear Security Administration (NNSA)
• Grant/Contract Number: AC04-94AL85000; SC0001160; NA0003525
• OSTI ID: 1441462
• Report Number(s): SAND2018-4606J; 662738
• Journal Information: Chemistry of Materials, Vol. 30, Issue 8; ISSN 0897-4756
• Publisher: American Chemical Society (ACS)
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE