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Title: Quantitative secondary electron detection

Abstract

Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.

Inventors:
; ;
Publication Date:
Research Org.:
ScienceTomorrow LLC, Lexington, KY (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1440018
Patent Number(s):
9,966,224
Application Number:
14/918,560
Assignee:
ScienceTomorrow LLC (Lexington, KY) CHO
DOE Contract Number:  
SC0009649
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Oct 20
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Agrawal, Jyoti, Joy, David C., and Nayak, Subuhadarshi. Quantitative secondary electron detection. United States: N. p., 2018. Web.
Agrawal, Jyoti, Joy, David C., & Nayak, Subuhadarshi. Quantitative secondary electron detection. United States.
Agrawal, Jyoti, Joy, David C., and Nayak, Subuhadarshi. Tue . "Quantitative secondary electron detection". United States. https://www.osti.gov/servlets/purl/1440018.
@article{osti_1440018,
title = {Quantitative secondary electron detection},
author = {Agrawal, Jyoti and Joy, David C. and Nayak, Subuhadarshi},
abstractNote = {Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {5}
}

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